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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F08%3A00025162%21RIV10-MSM-14310___
rdf:type
n6:Vysledek skos:Concept
dcterms:description
A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra.
dcterms:title
Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model
skos:prefLabel
Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model
skos:notation
RIV/00216224:14310/08:00025162!RIV10-MSM-14310___
n3:aktivita
n7:Z n7:P
n3:aktivity
P(GA202/06/0776), Z(MSM0021622411)
n3:dodaniDat
n12:2010
n3:domaciTvurceVysledku
n11:1034871 n11:3512908 n11:6296556 n11:4701089
n3:druhVysledku
n17:D
n3:duvernostUdaju
n4:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
373213
n3:idVysledku
RIV/00216224:14310/08:00025162
n3:jazykVysledku
n13:eng
n3:klicovaSlova
rf discharge; collisional-radiative model; optical emission spectroscopy; neon
n3:klicoveSlovo
n15:optical%20emission%20spectroscopy n15:collisional-radiative%20model n15:rf%20discharge n15:neon
n3:kontrolniKodProRIV
[D8EDD4ACFCE6]
n3:mistoKonaniAkce
Praha
n3:mistoVydani
Praha
n3:nazevZdroje
Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008
n3:obor
n20:BL
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
4
n3:projekt
n9:GA202%2F06%2F0776
n3:rokUplatneniVysledku
n12:2008
n3:tvurceVysledku
Jurmanová, Jana Trunec, David Dvořák, Pavel Navrátil, Zdeněk
n3:typAkce
n22:WRD
n3:zahajeniAkce
2008-06-16+02:00
n3:zamer
n8:MSM0021622411
s:numberOfPages
1
n16:hasPublisher
ČVUT v Praze, Organizační výbor sympozia
n21:isbn
978-80-01-04030-0
n10:organizacniJednotka
14310