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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F07%3A00020430%21RIV10-MSM-14310___
rdf:type
skos:Concept n9:Vysledek
dcterms:description
A collisional-radiative model was used to determine the electron temperature in capacitively coupled RF (13.56 MHz) discharge in neon. Two discharge regimes at different pressures were investigated. The temperature was determined from the fit of the theoretical spectra to the spectra measured by optical emission spectroscopy. Three kinds of electron distribution function - Maxwellian, Bi-Maxwellian and Pseudo-Bi-Maxwellian - were considered. The results were compared with Particle-in-Cell/ Monte-Carlo simulation. The comparison of the fitted calculated and measured spectra shows a good agreement between the theory and experiment. The electron temperature, which was estimated from the fits, was approx. 6 eV in the sheath at neon pressure of 10 Pa and approx. 2 eV in the bulk plasma at neon pressure of 80 Pa. A collisional-radiative model was used to determine the electron temperature in capacitively coupled RF (13.56 MHz) discharge in neon. Two discharge regimes at different pressures were investigated. The temperature was determined from the fit of the theoretical spectra to the spectra measured by optical emission spectroscopy. Three kinds of electron distribution function - Maxwellian, Bi-Maxwellian and Pseudo-Bi-Maxwellian - were considered. The results were compared with Particle-in-Cell/ Monte-Carlo simulation. The comparison of the fitted calculated and measured spectra shows a good agreement between the theory and experiment. The electron temperature, which was estimated from the fits, was approx. 6 eV in the sheath at neon pressure of 10 Pa and approx. 2 eV in the bulk plasma at neon pressure of 80 Pa.
dcterms:title
Determination of electron temperature in neon RF discharge by means of collisional-radiative model Determination of electron temperature in neon RF discharge by means of collisional-radiative model
skos:prefLabel
Determination of electron temperature in neon RF discharge by means of collisional-radiative model Determination of electron temperature in neon RF discharge by means of collisional-radiative model
skos:notation
RIV/00216224:14310/07:00020430!RIV10-MSM-14310___
n3:aktivita
n17:Z n17:P
n3:aktivity
P(GA202/03/0776), P(GA202/06/0776), P(GA202/06/1473), Z(MSM0021622411)
n3:dodaniDat
n5:2010
n3:domaciTvurceVysledku
n7:4701089 n7:3319318 n7:7444303 n7:1034871 n7:3393658
n3:druhVysledku
n8:D
n3:duvernostUdaju
n18:S
n3:entitaPredkladatele
n21:predkladatel
n3:idSjednocenehoVysledku
416654
n3:idVysledku
RIV/00216224:14310/07:00020430
n3:jazykVysledku
n10:eng
n3:klicovaSlova
neon RF discharge; optical emission spectroscopy; collisional-radiative model
n3:klicoveSlovo
n11:collisional-radiative%20model n11:neon%20RF%20discharge n11:optical%20emission%20spectroscopy
n3:kontrolniKodProRIV
[FD64D8A39CD9]
n3:mistoKonaniAkce
Praha
n3:mistoVydani
Praha
n3:nazevZdroje
Proceedings of ICPIG XXVIII
n3:obor
n12:BL
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
5
n3:projekt
n14:GA202%2F06%2F1473 n14:GA202%2F06%2F0776 n14:GA202%2F03%2F0776
n3:rokUplatneniVysledku
n5:2007
n3:tvurceVysledku
Brzobohatý, Oto Šmíd, Radek Navrátil, Zdeněk Lazar, Lukáš Trunec, David
n3:typAkce
n20:WRD
n3:zahajeniAkce
2007-07-15+02:00
n3:zamer
n4:MSM0021622411
s:numberOfPages
3
n22:hasPublisher
Ústav fyziky plazmatu AV ČR
n19:isbn
978-80-87026-01-4
n16:organizacniJednotka
14310