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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F07%3A00020161%21RIV10-GA0-14310___
rdf:type
skos:Concept n8:Vysledek
dcterms:description
Capacitively coupled RF discharge in neon (13.56 MHz) was studied by spatially resolved optical emission spectroscopy and collisional-radiative model. Two discharge regimes at different pressures (10 and 80 Pa) were investigated. The measured intensities of prominent neon spectral lines in conjunction with the model were used to determine the electron temperature. Capacitively coupled RF discharge in neon (13.56 MHz) was studied by spatially resolved optical emission spectroscopy and collisional-radiative model. Two discharge regimes at different pressures (10 and 80 Pa) were investigated. The measured intensities of prominent neon spectral lines in conjunction with the model were used to determine the electron temperature.
dcterms:title
Spatially resolved optical diagnostics of neon RF discharge Spatially resolved optical diagnostics of neon RF discharge
skos:prefLabel
Spatially resolved optical diagnostics of neon RF discharge Spatially resolved optical diagnostics of neon RF discharge
skos:notation
RIV/00216224:14310/07:00020161!RIV10-GA0-14310___
n3:aktivita
n6:P
n3:aktivity
P(GA202/06/0776), P(GA202/06/1473)
n3:dodaniDat
n18:2010
n3:domaciTvurceVysledku
n4:7444303 n4:4701089 n4:1034871 n4:3393658
n3:druhVysledku
n17:D
n3:duvernostUdaju
n12:S
n3:entitaPredkladatele
n13:predkladatel
n3:idSjednocenehoVysledku
451424
n3:idVysledku
RIV/00216224:14310/07:00020161
n3:jazykVysledku
n16:eng
n3:klicovaSlova
neon RF discharge; optical emission spectroscopy; collisional-radiative model
n3:klicoveSlovo
n7:optical%20emission%20spectroscopy n7:neon%20RF%20discharge n7:collisional-radiative%20model
n3:kontrolniKodProRIV
[D0290085E399]
n3:mistoKonaniAkce
Podbanské
n3:mistoVydani
Bratislava
n3:nazevZdroje
Book of Abstracts of 16th Symposium on Application of Plasma Processes
n3:obor
n10:BL
n3:pocetDomacichTvurcuVysledku
4
n3:pocetTvurcuVysledku
4
n3:projekt
n15:GA202%2F06%2F0776 n15:GA202%2F06%2F1473
n3:rokUplatneniVysledku
n18:2007
n3:tvurceVysledku
Navrátil, Zdeněk Trunec, David Lazar, Lukáš Šmíd, Radek
n3:typAkce
n14:WRD
n3:zahajeniAkce
2007-01-20+01:00
s:numberOfPages
2
n21:hasPublisher
Univerzita Komenského v Bratislave
n20:isbn
978-80-89186-13-6
n11:organizacniJednotka
14310