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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F06%3A00016820%21RIV10-MSM-14310___
rdf:type
n13:Vysledek skos:Concept
dcterms:description
Modern material technology relies increasingly on processes for surface modification and coating. Generally we are lacking a possibility to monitor the progress of such processes. Thus the outcome can only be analyzed after the end of the whole process cycle. We are proposing to use spectroscopic ellipsometry (SE) as an on-line monitoring tool. As an optical method, SE is not affected by high temperatures, process gases, plasmas, etc. SE can be used as a monitoring tool or a sensor for closed loop control of processes. The main difficulty is the on line interpretation of SE data. Depending on the nature of the process monitored or controlled, different models are used for the interpretation. These models predict the SE response depending on different parameters describing the surface under investigation. A fitting process is used to solve the inverse problem, i.e. extracting material data from the SE spectra. Modern material technology relies increasingly on processes for surface modification and coating. Generally we are lacking a possibility to monitor the progress of such processes. Thus the outcome can only be analyzed after the end of the whole process cycle. We are proposing to use spectroscopic ellipsometry (SE) as an on-line monitoring tool. As an optical method, SE is not affected by high temperatures, process gases, plasmas, etc. SE can be used as a monitoring tool or a sensor for closed loop control of processes. The main difficulty is the on line interpretation of SE data. Depending on the nature of the process monitored or controlled, different models are used for the interpretation. These models predict the SE response depending on different parameters describing the surface under investigation. A fitting process is used to solve the inverse problem, i.e. extracting material data from the SE spectra.
dcterms:title
Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes
skos:prefLabel
Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes
skos:notation
RIV/00216224:14310/06:00016820!RIV10-MSM-14310___
n3:aktivita
n7:Z
n3:aktivity
Z(MSM0021622410)
n3:cisloPeriodika
4
n3:dodaniDat
n8:2010
n3:domaciTvurceVysledku
n12:1834282 n12:1841971
n3:druhVysledku
n16:J
n3:duvernostUdaju
n18:S
n3:entitaPredkladatele
n17:predkladatel
n3:idSjednocenehoVysledku
500787
n3:idVysledku
RIV/00216224:14310/06:00016820
n3:jazykVysledku
n14:eng
n3:klicovaSlova
surface treatment; spectroscopic ellipsometry; on-line monitor; closed loop control; nitriding
n3:klicoveSlovo
n4:surface%20treatment n4:nitriding n4:spectroscopic%20ellipsometry n4:closed%20loop%20control n4:on-line%20monitor
n3:kodStatuVydavatele
US - Spojené státy americké
n3:kontrolniKodProRIV
[4C8EE5341B42]
n3:nazevZdroje
Materials Science Forum
n3:obor
n9:BM
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
4
n3:rokUplatneniVysledku
n8:2006
n3:svazekPeriodika
518
n3:tvurceVysledku
Fikar, Jan Humlíček, Josef Forsich, Christian Eitzinger, Christian
n3:zamer
n10:MSM0021622410
s:issn
0255-5476
s:numberOfPages
8
n5:organizacniJednotka
14310