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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F06%3A00016195%21RIV10-MSM-14310___
rdf:type
n10:Vysledek skos:Concept
dcterms:description
The electron density, ion flux and argon emission lines were measured in a radio frequency helicon reactor for different static magnetic field amplitude and low rf powers using cylindrical Langmuir probe, planar probe and optical emission spectroscopy (OES). The static magnetic field amplitude created around the plasma source varied from 0 to 10 mT in the helicon source and from 0 to 1.4 mT in the diffusion chamber. The discharge was created in argon and oxygen at 0.7 Pa with rf powers, between 50 and 600 W, applied to the helicon antenna. The variations of the electron density, ion flux taken from Langmuir probe measurement and from planar probe measurement and Ar 750 nm line intensity with the rf power were in good agreement. Hence, it is concluded that the maximum of electron density observed in the diffusion chamber for the highest values of magnetic field is likely to be due to some confinement of the plasma in the source. Measurements in oxygen discharge showed slightly different results. The electron density, ion flux and argon emission lines were measured in a radio frequency helicon reactor for different static magnetic field amplitude and low rf powers using cylindrical Langmuir probe, planar probe and optical emission spectroscopy (OES). The static magnetic field amplitude created around the plasma source varied from 0 to 10 mT in the helicon source and from 0 to 1.4 mT in the diffusion chamber. The discharge was created in argon and oxygen at 0.7 Pa with rf powers, between 50 and 600 W, applied to the helicon antenna. The variations of the electron density, ion flux taken from Langmuir probe measurement and from planar probe measurement and Ar 750 nm line intensity with the rf power were in good agreement. Hence, it is concluded that the maximum of electron density observed in the diffusion chamber for the highest values of magnetic field is likely to be due to some confinement of the plasma in the source. Measurements in oxygen discharge showed slightly different results.
dcterms:title
Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor
skos:prefLabel
Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor
skos:notation
RIV/00216224:14310/06:00016195!RIV10-MSM-14310___
n3:aktivita
n6:Z n6:P
n3:aktivity
P(GD202/03/H162), Z(MSM0021622411)
n3:dodaniDat
n5:2010
n3:domaciTvurceVysledku
n8:4205448 n8:7444303
n3:druhVysledku
n16:D
n3:duvernostUdaju
n21:S
n3:entitaPredkladatele
n15:predkladatel
n3:idSjednocenehoVysledku
473799
n3:idVysledku
RIV/00216224:14310/06:00016195
n3:jazykVysledku
n12:eng
n3:klicovaSlova
Langmuir probe; planar probe; ion flux; electron density
n3:klicoveSlovo
n14:planar%20probe n14:Langmuir%20probe n14:ion%20flux n14:electron%20density
n3:kontrolniKodProRIV
[319F8E3CC18D]
n3:mistoKonaniAkce
Praha
n3:mistoVydani
Praha
n3:nazevZdroje
WDS'06 Proceedings of Contributed Papers, Part II
n3:obor
n9:BL
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
5
n3:projekt
n13:GD202%2F03%2FH162
n3:rokUplatneniVysledku
n5:2006
n3:tvurceVysledku
Šmíd, Radek Cartry, Gilles Bousquet, Angelique Granier, Agnès Zajíčková, Lenka
n3:typAkce
n18:EUR
n3:zahajeniAkce
2006-01-01+01:00
n3:zamer
n19:MSM0021622411
s:numberOfPages
6
n22:hasPublisher
MATFYZPRESS
n7:isbn
80-86732-85-1
n20:organizacniJednotka
14310