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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F06%3A00015763%21RIV11-GA0-14310___
rdf:type
n5:Vysledek skos:Concept
dcterms:description
In this work the mixture of hydrogen and a small amount (0-1.5 %) of methane was studied. The measurements were carried out in a low-pressure (5 Pa) capacitively coupled radio frequency discharge. Positive ions and neutral particles were detected by Plasma Process Monitor PPM 421 (Balzers). Optical emission spectra of active discharge were measured by spectrometer Triax 550 Jobin-Yvon Spex. The dominating ions in the discharge were H+. Its amount was significantly decreased when a small amount of methane was added. Although we did not observe any neutral particles heavier than the methane, the positive ions with 1-3 carbon atoms were detected. The dominant carbon containing ion was CH5+. Further, the dissociation degree of hydrogen molecules decreased when methane was added into the discharge. In this work the mixture of hydrogen and a small amount (0-1.5 %) of methane was studied. The measurements were carried out in a low-pressure (5 Pa) capacitively coupled radio frequency discharge. Positive ions and neutral particles were detected by Plasma Process Monitor PPM 421 (Balzers). Optical emission spectra of active discharge were measured by spectrometer Triax 550 Jobin-Yvon Spex. The dominating ions in the discharge were H+. Its amount was significantly decreased when a small amount of methane was added. Although we did not observe any neutral particles heavier than the methane, the positive ions with 1-3 carbon atoms were detected. The dominant carbon containing ion was CH5+. Further, the dissociation degree of hydrogen molecules decreased when methane was added into the discharge.
dcterms:title
Influence of methane on the capacitively coupled hydrogen discharge Influence of methane on the capacitively coupled hydrogen discharge
skos:prefLabel
Influence of methane on the capacitively coupled hydrogen discharge Influence of methane on the capacitively coupled hydrogen discharge
skos:notation
RIV/00216224:14310/06:00015763!RIV11-GA0-14310___
n3:aktivita
n15:Z n15:P
n3:aktivity
P(GD202/03/H162), Z(MSM0021622411)
n3:cisloPeriodika
Suppl.B
n3:dodaniDat
n9:2011
n3:domaciTvurceVysledku
n7:4346610 n7:6296556 n7:5925932
n3:druhVysledku
n17:J
n3:duvernostUdaju
n11:S
n3:entitaPredkladatele
n14:predkladatel
n3:idSjednocenehoVysledku
479438
n3:idVysledku
RIV/00216224:14310/06:00015763
n3:jazykVysledku
n18:eng
n3:klicovaSlova
hydrogen; methane; discharge
n3:klicoveSlovo
n4:hydrogen n4:discharge n4:methane
n3:kodStatuVydavatele
CZ - Česká republika
n3:kontrolniKodProRIV
[DB51FA411AA8]
n3:nazevZdroje
Czechoslovak journal of physics
n3:obor
n16:BL
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
3
n3:projekt
n8:GD202%2F03%2FH162
n3:rokUplatneniVysledku
n9:2006
n3:svazekPeriodika
56
n3:tvurceVysledku
Doležal, Vojtěch Janča, Jan Dvořák, Pavel
n3:wos
000241336500012
n3:zamer
n10:MSM0021622411
s:issn
0011-4626
s:numberOfPages
5
n19:organizacniJednotka
14310