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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F05%3A00014247%21RIV10-MSM-14310___
rdf:type
n5:Vysledek skos:Concept
dcterms:description
In present paper we studied the optical constants of the diamond-like carbon (DLC) films and their changes with annealing. The multisample modification of combined variable angle spectroscopic ellipsometry and near normal spectroscopic reflectometry was used. The optical constants of the DLC films were simulated by our recently published six-parameter dispersion model employing a parameterization of the density of electronic states (DOS). Based on the dispersion model parameters the density of and electrons were evaluated. We showed that from our model and the independently determined hydrogen atomic fraction of the films before and after annealing the ratio between momentum matrix elements of pi->pi* and sigma->sigma* transitions and the correct sp3-to-sp2 carbon bonding configuration ratio can be calculated. In present paper we studied the optical constants of the diamond-like carbon (DLC) films and their changes with annealing. The multisample modification of combined variable angle spectroscopic ellipsometry and near normal spectroscopic reflectometry was used. The optical constants of the DLC films were simulated by our recently published six-parameter dispersion model employing a parameterization of the density of electronic states (DOS). Based on the dispersion model parameters the density of and electrons were evaluated. We showed that from our model and the independently determined hydrogen atomic fraction of the films before and after annealing the ratio between momentum matrix elements of pi->pi* and sigma->sigma* transitions and the correct sp3-to-sp2 carbon bonding configuration ratio can be calculated.
dcterms:title
Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films
skos:prefLabel
Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films
skos:notation
RIV/00216224:14310/05:00014247!RIV10-MSM-14310___
n3:aktivita
n13:Z
n3:aktivity
Z(MSM 143100003)
n3:cisloPeriodika
11-12
n3:dodaniDat
n6:2010
n3:domaciTvurceVysledku
n9:5823803 n9:9412921 n9:4205448 n9:2026384 n9:1462202
n3:druhVysledku
n18:J
n3:duvernostUdaju
n14:S
n3:entitaPredkladatele
n4:predkladatel
n3:idSjednocenehoVysledku
546692
n3:idVysledku
RIV/00216224:14310/05:00014247
n3:jazykVysledku
n7:eng
n3:klicovaSlova
DLC; Thermal stability; optical properties; sp3/sp2 ratio
n3:klicoveSlovo
n11:DLC n11:optical%20properties n11:Thermal%20stability n11:sp3%2Fsp2%20ratio
n3:kodStatuVydavatele
US - Spojené státy americké
n3:kontrolniKodProRIV
[95034765E847]
n3:nazevZdroje
Diamond and Related Materials
n3:obor
n15:BM
n3:pocetDomacichTvurcuVysledku
5
n3:pocetTvurcuVysledku
5
n3:rokUplatneniVysledku
n6:2005
n3:svazekPeriodika
14
n3:tvurceVysledku
Buršíková, Vilma Zajíčková, Lenka Ohlídal, Ivan Sťahel, Pavel Franta, Daniel
n3:zamer
n16:MSM%20143100003
s:issn
0925-9635
s:numberOfPages
4
n17:organizacniJednotka
14310