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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F05%3A00014212%21RIV10-MSM-14310___
rdf:type
skos:Concept n20:Vysledek
dcterms:description
We applied actinometry for the calculation of dissociation degree in oxygen CCP discharges used for the deposition from O2/HMDSO plasmas. Dissociation degree exhibited a slight increase with increasing r.f. power and maximum of 20% for 5 Pa of oxygen. This relatively high value was not enough for deposition of SiO2-like films because the HMDSO percentage in the feed was too high at this low oxygen partial pressure. Rapid decrease of dissociation degree to 2-4% for higher oxygen flow rates, i.e. higher pressures resulted in still insufficient oxidation of film precursors. We applied actinometry for the calculation of dissociation degree in oxygen CCP discharges used for the deposition from O2/HMDSO plasmas. Dissociation degree exhibited a slight increase with increasing r.f. power and maximum of 20% for 5 Pa of oxygen. This relatively high value was not enough for deposition of SiO2-like films because the HMDSO percentage in the feed was too high at this low oxygen partial pressure. Rapid decrease of dissociation degree to 2-4% for higher oxygen flow rates, i.e. higher pressures resulted in still insufficient oxidation of film precursors.
dcterms:title
Actinometry for understanding PECVD of thin films from O2/HMDSO plasmas Actinometry for understanding PECVD of thin films from O2/HMDSO plasmas
skos:prefLabel
Actinometry for understanding PECVD of thin films from O2/HMDSO plasmas Actinometry for understanding PECVD of thin films from O2/HMDSO plasmas
skos:notation
RIV/00216224:14310/05:00014212!RIV10-MSM-14310___
n3:aktivita
n8:P n8:Z
n3:aktivity
P(1K05025), Z(MSM 143100003), Z(MSM0021622411)
n3:dodaniDat
n14:2010
n3:domaciTvurceVysledku
n5:5823803 n5:4205448 n5:7444303
n3:druhVysledku
n21:D
n3:duvernostUdaju
n12:S
n3:entitaPredkladatele
n18:predkladatel
n3:idSjednocenehoVysledku
511289
n3:idVysledku
RIV/00216224:14310/05:00014212
n3:jazykVysledku
n22:eng
n3:klicovaSlova
actinometry; HMDSO; optical emission spectroscopy
n3:klicoveSlovo
n4:optical%20emission%20spectroscopy n4:actinometry n4:HMDSO
n3:kontrolniKodProRIV
[31BD05919286]
n3:mistoKonaniAkce
Eindhoven, Nizozemí
n3:mistoVydani
Eindhoven, Nizozemí
n3:nazevZdroje
Proceedings of the XXVII ICPIG
n3:obor
n15:BL
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
3
n3:projekt
n16:1K05025
n3:rokUplatneniVysledku
n14:2005
n3:tvurceVysledku
Šmíd, Radek Zajíčková, Lenka Buršíková, Vilma
n3:typAkce
n6:WRD
n3:zahajeniAkce
2005-07-17+02:00
n3:zamer
n10:MSM0021622411 n10:MSM%20143100003
s:numberOfPages
4
n19:hasPublisher
Eindhoven University of Technology, Nizozemí
n7:isbn
90-386-2231-7
n13:organizacniJednotka
14310