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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F05%3A00012905%21RIV10-MSM-14310___
rdf:type
skos:Concept n16:Vysledek
dcterms:description
To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode, we performed spectroscopic measurements with time and space resolution. The microwave antennas placed between target and substrate ensure proper conditions of current pulse development, ion transport and., by re-exciting sputtered species, allows spectroscopic emission measurements of species transported towards the substrate. Measured data are presented and discussed. To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode, we performed spectroscopic measurements with time and space resolution. The microwave antennas placed between target and substrate ensure proper conditions of current pulse development, ion transport and., by re-exciting sputtered species, allows spectroscopic emission measurements of species transported towards the substrate. Measured data are presented and discussed.
dcterms:title
Spectroscopic analysis of a pulsed magnetron discharge Spectroscopic analysis of a pulsed magnetron discharge
skos:prefLabel
Spectroscopic analysis of a pulsed magnetron discharge Spectroscopic analysis of a pulsed magnetron discharge
skos:notation
RIV/00216224:14310/05:00012905!RIV10-MSM-14310___
n3:aktivita
n8:P n8:Z
n3:aktivity
P(GD202/03/H162), Z(MSM0021622411)
n3:cisloPeriodika
5
n3:dodaniDat
n4:2010
n3:domaciTvurceVysledku
n14:8936153 n14:3589730
n3:druhVysledku
n6:J
n3:duvernostUdaju
n19:S
n3:entitaPredkladatele
n10:predkladatel
n3:idSjednocenehoVysledku
543902
n3:idVysledku
RIV/00216224:14310/05:00012905
n3:jazykVysledku
n11:eng
n3:klicovaSlova
pulsed magnetron; spatially resolved diagnostics; time resolved diagnostics; transport processes; preionisation
n3:klicoveSlovo
n9:time%20resolved%20diagnostics n9:spatially%20resolved%20diagnostics n9:pulsed%20magnetron n9:preionisation n9:transport%20processes
n3:kodStatuVydavatele
RO - Rumunsko
n3:kontrolniKodProRIV
[C898113081E6]
n3:nazevZdroje
Journal of Optoelectronics and Advanced Materials
n3:obor
n13:BL
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
10
n3:projekt
n17:GD202%2F03%2FH162
n3:rokUplatneniVysledku
n4:2005
n3:svazekPeriodika
7
n3:tvurceVysledku
Vašina, Petr Touzeau, Michel Boisse-Laporte, Caroline Ganciu, Mihai Bretagne, Jean Pagnon, Daniel Imbert, Jean-Christophe Meško, Marcel de Poucques, Ludovic Teulé-Gay, Lionel
n3:zamer
n18:MSM0021622411
s:issn
1454-4164
s:numberOfPages
4
n15:organizacniJednotka
14310