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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F05%3A00012840%21RIV10-MSM-14310___
rdf:type
n19:Vysledek skos:Concept
dcterms:description
Study of the mechanical properties of thin films prepared by PECVD using combined nanoindentation and AFM measurements. Study of the mechanical properties of thin films prepared by PECVD using combined nanoindentation and AFM measurements.
dcterms:title
Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements
skos:prefLabel
Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements
skos:notation
RIV/00216224:14310/05:00012840!RIV10-MSM-14310___
n3:aktivita
n7:P n7:Z
n3:aktivity
P(GA106/05/0274), Z(MSM0021622411)
n3:cisloPeriodika
11_12
n3:dodaniDat
n10:2010
n3:domaciTvurceVysledku
n13:8326827 n13:5823803 n13:2260387
n3:druhVysledku
n8:J
n3:duvernostUdaju
n17:S
n3:entitaPredkladatele
n6:predkladatel
n3:idSjednocenehoVysledku
545283
n3:idVysledku
RIV/00216224:14310/05:00012840
n3:jazykVysledku
n11:eng
n3:klicovaSlova
nanoindentation; AFM; thin films; mechanical properties
n3:klicoveSlovo
n4:mechanical%20properties n4:AFM n4:nanoindentation n4:thin%20films
n3:kodStatuVydavatele
CZ - Česká republika
n3:kontrolniKodProRIV
[18C5AE9B4367]
n3:nazevZdroje
Jemná mechanika a optika
n3:obor
n15:BM
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
4
n3:projekt
n5:GA106%2F05%2F0274
n3:rokUplatneniVysledku
n10:2005
n3:svazekPeriodika
50
n3:tvurceVysledku
Klapetek, Petr Buršíková, Vilma Eliáš, Marek Bousquet, Angelique
n3:zamer
n18:MSM0021622411
s:issn
0447-6441
s:numberOfPages
4
n16:organizacniJednotka
14310