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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F04%3A00010375%21RIV08-MSM-14310___
rdf:type
skos:Concept n11:Vysledek
dcterms:description
Energy distribution functions of ions impinging on substrate in microwave plasma Rozdelovaci funkce iontu dopadajicich na substart v mikrovlnnem plazmatu Energy distribution functions of ions impinging on substrate in microwave plasma
dcterms:title
Energy distribution functions of ions impinging on substrate in microwave plasma Rozdelovaci funkce iontu dopadajicich na substart v mikrovlnnem plazmatu Energy distribution functions of ions impinging on substrate in microwave plasma
skos:prefLabel
Rozdelovaci funkce iontu dopadajicich na substart v mikrovlnnem plazmatu Energy distribution functions of ions impinging on substrate in microwave plasma Energy distribution functions of ions impinging on substrate in microwave plasma
skos:notation
RIV/00216224:14310/04:00010375!RIV08-MSM-14310___
n5:strany
438-444
n5:aktivita
n6:Z
n5:aktivity
Z(MSM 143100003)
n5:cisloPeriodika
3
n5:dodaniDat
n14:2008
n5:domaciTvurceVysledku
n13:8325677 n13:8936153
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n9:J
n5:duvernostUdaju
n18:S
n5:entitaPredkladatele
n17:predkladatel
n5:idSjednocenehoVysledku
562871
n5:idVysledku
RIV/00216224:14310/04:00010375
n5:jazykVysledku
n10:eng
n5:klicovaSlova
IEDF; large area microwave plasma; sheath
n5:klicoveSlovo
n8:sheath n8:large%20area%20microwave%20plasma n8:IEDF
n5:kodStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
n5:kontrolniKodProRIV
[07FD7908D2BF]
n5:nazevZdroje
Journal of physics D: Applied physics
n5:obor
n16:BL
n5:pocetDomacichTvurcuVysledku
2
n5:pocetTvurcuVysledku
5
n5:rokUplatneniVysledku
n14:2004
n5:svazekPeriodika
37
n5:tvurceVysledku
Kudrle, Vít Meško, Marcel Fujita, H. Cicman, Peter Ohtsu, Y.
n5:zamer
n15:MSM%20143100003
s:issn
0022-3727
s:numberOfPages
7
n3:organizacniJednotka
14310