This HTML5 document contains 49 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

Namespace Prefixes

PrefixIRI
n19http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
n12http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F00216224%3A14310%2F03%3A00025490%21RIV09-MSM-14310___/
dctermshttp://purl.org/dc/terms/
n17http://purl.org/net/nknouf/ns/bibtex#
n16http://localhost/temp/predkladatel/
n7http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n13http://linked.opendata.cz/ontology/domain/vavai/
n20http://linked.opendata.cz/resource/domain/vavai/zamer/
n3https://schema.org/
shttp://schema.org/
skoshttp://www.w3.org/2004/02/skos/core#
n4http://linked.opendata.cz/ontology/domain/vavai/riv/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n5http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n8http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n21http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n14http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n15http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n9http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n18http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F03%3A00025490%21RIV09-MSM-14310___
rdf:type
n13:Vysledek skos:Concept
dcterms:description
Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too. Výsledky optické emisní a absorpční spektroskopie z reaktoru obsahujícího magnetron a dvě mikrovlnné antény jsou diskutovány společně s výsledky vrstev z rastrovacího elektronového mikroskopu. Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too.
dcterms:title
Prostorově rozložení částic v IPVD reactorem Spatial Distribution of Species in an IPVD reactor Spatial Distribution of Species in an IPVD reactor
skos:prefLabel
Spatial Distribution of Species in an IPVD reactor Spatial Distribution of Species in an IPVD reactor Prostorově rozložení částic v IPVD reactorem
skos:notation
RIV/00216224:14310/03:00025490!RIV09-MSM-14310___
n4:aktivita
n21:Z
n4:aktivity
Z(MSM 143100003)
n4:dodaniDat
n18:2009
n4:domaciTvurceVysledku
n7:5816963 n7:3589730
n4:druhVysledku
n15:D
n4:duvernostUdaju
n8:S
n4:entitaPredkladatele
n12:predkladatel
n4:idSjednocenehoVysledku
628028
n4:idVysledku
RIV/00216224:14310/03:00025490
n4:jazykVysledku
n14:eng
n4:klicovaSlova
optical emission spectroscopy; optical absorption spectroscopy; IPVD; magnetron
n4:klicoveSlovo
n5:IPVD n5:optical%20emission%20spectroscopy n5:optical%20absorption%20spectroscopy n5:magnetron
n4:kontrolniKodProRIV
[3C64EDC58CEC]
n4:mistoKonaniAkce
Charles University in Prague, Faculty of Matema
n4:mistoVydani
Praha
n4:nazevZdroje
WDS 03 Proceeding of Contributed Papers
n4:obor
n9:BL
n4:pocetDomacichTvurcuVysledku
2
n4:pocetTvurcuVysledku
6
n4:rokUplatneniVysledku
n18:2003
n4:tvurceVysledku
Vašina, Petr de Poucques, Ludovic Touzeau, Michel Bublan, Martin Boisse-Laporte, Caroline Imbert, Jean-Christophe
n4:typAkce
n19:WRD
n4:zahajeniAkce
2003-06-10+02:00
n4:zamer
n20:MSM%20143100003
s:numberOfPages
4
n17:hasPublisher
MARFYZPRESS, vydavatelství Matematicko-fyzikální fakulty University Karlovy v Praze
n3:isbn
80-86732-18-5
n16:organizacniJednotka
14310