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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F03%3A00021418%21RIV08-MSM-14310___
rdf:type
skos:Concept n16:Vysledek
dcterms:description
Tvrdé diamantu podobné uhlíkové vrstvy (DLC) s příměsí SiOx bylu připraveny v kapacitně vázaném vf výboji ze směsi metanu a hexametyldisiloxanu (HMDSO). Byl měněn průtok HMDSO, což ovlivňovalo množství SiOx ve vrstvách. Metodou Rutherfordovského zpětného rozptylu kombinovanou s metodou ERDA bylo stanoveno kompletní atomární složení vrstev. Tloušťka a optické vlastnosti byly stanoveny z elipsometrických měření. Mechanické vlastnosti byly studovány hloubkově citlivou indentační technikou za pomocí přístroje Fischerscope H100. Poměr O/Si v DLC:SiOx vrstvách byl 0,286 a obsah SiOx se zvyšoval s rostoucím poměrem průtoku HMDSO k metanu (q). Vrstvy DLC:SiOx byly z hlediska optických vlastností v uv a viditelné oblasti podobné vrstvám DLC a vykazovaly podobně vysokou tvrdost jako DLC vrstvy pokud byl poměr q maximálně 0,25. Podařilo se ovšem zredukovat vysoké tlakové pnutí ve vrstvách, byla podstatně vylepšena lomová houževnatost a zvýšila se depoziční rychlost. Hard diamond like carbon (DLC) films with an addition of SiOx were deposited in capacitively coupled rf discharges from a mixture of methane and hexamethyldisiloxane (HMDSO). The flow rate of HMDSO was changed in order to vary the SiOx content in the films. Complete atomic composition of the films was determined by Rutherford backscattering spectroscopy combined with elastic recoil detection analysis. The thickness and the optical properties were obtained from the ellipsometric measurements. The mechanical properties were studied by a depth sensing indentation technique using Fischerscope H100 tester. The O/Si ratio in DLC:SiOx films was 0.286 and the content of SiOx increased with the HMDSO-to-methane flow rate ratio q. The DLC:SiOx films were close to DLC films as concerning the optical properties in the uv/visible and the high hardness if q was maximum 0.25. However, the compressive stress in the films was reduced, the film fracture toughness was improved and the deposition rate increased. Hard diamond like carbon (DLC) films with an addition of SiOx were deposited in capacitively coupled rf discharges from a mixture of methane and hexamethyldisiloxane (HMDSO). The flow rate of HMDSO was changed in order to vary the SiOx content in the films. Complete atomic composition of the films was determined by Rutherford backscattering spectroscopy combined with elastic recoil detection analysis. The thickness and the optical properties were obtained from the ellipsometric measurements. The mechanical properties were studied by a depth sensing indentation technique using Fischerscope H100 tester. The O/Si ratio in DLC:SiOx films was 0.286 and the content of SiOx increased with the HMDSO-to-methane flow rate ratio q. The DLC:SiOx films were close to DLC films as concerning the optical properties in the uv/visible and the high hardness if q was maximum 0.25. However, the compressive stress in the films was reduced, the film fracture toughness was improved and the deposition rate increased.
dcterms:title
Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD Vztah mezi obsahem SiOx a vlastnostmi vrstev DLC:SiOx připravenými PECVD Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD
skos:prefLabel
Vztah mezi obsahem SiOx a vlastnostmi vrstev DLC:SiOx připravenými PECVD Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD
skos:notation
RIV/00216224:14310/03:00021418!RIV08-MSM-14310___
n5:strany
281-285
n5:aktivita
n9:P n9:Z
n5:aktivity
P(KSK1010104), Z(MSM 143100003)
n5:cisloPeriodika
174-175
n5:dodaniDat
n15:2008
n5:domaciTvurceVysledku
n12:9699414 n12:5823803 n12:4205448 n12:4346610
n5:druhVysledku
n6:J
n5:duvernostUdaju
n18:S
n5:entitaPredkladatele
n17:predkladatel
n5:idSjednocenehoVysledku
602291
n5:idVysledku
RIV/00216224:14310/03:00021418
n5:jazykVysledku
n11:eng
n5:klicovaSlova
DLC; PECVD
n5:klicoveSlovo
n7:DLC n7:PECVD
n5:kodStatuVydavatele
US - Spojené státy americké
n5:kontrolniKodProRIV
[3D08FC9CD965]
n5:nazevZdroje
Surface and Coating Technology
n5:obor
n13:BL
n5:pocetDomacichTvurcuVysledku
4
n5:pocetTvurcuVysledku
5
n5:projekt
n19:KSK1010104
n5:rokUplatneniVysledku
n15:2003
n5:svazekPeriodika
2003
n5:tvurceVysledku
Zajíčková, Lenka Janča, Jan Macková, Anna Buršíková, Vilma Peřina, Vratislav
n5:zamer
n14:MSM%20143100003
s:issn
0257-8972
s:numberOfPages
5
n8:organizacniJednotka
14310