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Statements

Subject Item
n2:RIV%2F00216224%3A14310%2F01%3A00004507%21RIV08-MSM-14310___
rdf:type
skos:Concept n20:Vysledek
dcterms:description
Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied. Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied. Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied.
dcterms:title
Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD
skos:prefLabel
Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD
skos:notation
RIV/00216224:14310/01:00004507!RIV08-MSM-14310___
n3:strany
144
n3:aktivita
n6:Z n6:P
n3:aktivity
P(GA202/00/P037), P(ME 301), Z(MSM 143100003)
n3:dodaniDat
n9:2008
n3:domaciTvurceVysledku
n15:5823803 n15:3319318 n15:4205448
n3:druhVysledku
n13:D
n3:duvernostUdaju
n22:S
n3:entitaPredkladatele
n10:predkladatel
n3:idSjednocenehoVysledku
690203
n3:idVysledku
RIV/00216224:14310/01:00004507
n3:jazykVysledku
n11:eng
n3:klicovaSlova
Diamond-like carbon; PECVD; Ellipsometry
n3:klicoveSlovo
n4:Ellipsometry n4:PECVD n4:Diamond-like%20carbon
n3:kontrolniKodProRIV
[D9EEC0F9334A]
n3:mistoKonaniAkce
19. - 20. 9. 2001, FSI VUT v Brně
n3:mistoVydani
Brno
n3:nazevZdroje
JUNIORMAT 01
n3:obor
n19:BL
n3:pocetDomacichTvurcuVysledku
3
n3:pocetTvurcuVysledku
3
n3:projekt
n5:GA202%2F00%2FP037 n5:ME%20301
n3:rokUplatneniVysledku
n9:2001
n3:tvurceVysledku
Zajíčková, Lenka Buršíková, Vilma Brzobohatý, Oto
n3:typAkce
n21:EUR
n3:zahajeniAkce
2001-01-01+01:00
n3:zamer
n17:MSM%20143100003
s:numberOfPages
2
n18:hasPublisher
Vysoké učení technické v Brně. Fakulta strojního inženýrství. Ústav materiálových věd a inženýrství; Česká společnost pro nové materiály a technologie
n16:isbn
80-214-1885-0
n12:organizacniJednotka
14310