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Statements

Subject Item
n2:RIV%2F00216208%3A11320%2F13%3A10191416%21RIV14-GA0-11320___
rdf:type
n3:Vysledek skos:Concept
rdfs:seeAlso
http://dx.doi.org/10.1088/0963-0252/22/1/015020
dcterms:description
We present results from two mutually independent measurements of plasma and neutral gas flow velocities in a plasma jet deposition system. Operation of a hollow-cathode discharge within the plasma jet nozzle in the pulse regime enables the simple use of a classical Langmuir probe for the plasma flow velocity measurement. In this method, we assume that the plasma is generated solely inside the nozzle during the power impulse and we measure the time of flight of the ions along a known distance between the nozzle end and the probe. The plasma velocity at the plasma jet axis is then determined by differentiation of the dependence of the distance covered by ions on time. As the second method the well-known Pitot tube is used for measurement of the neutral gas velocity. By comparison of both methods we have experimentally proved that the neutral gas flow velocity is almost unaffected by the presence of the plasma, i.e. it does not substantially depend on whether the discharge is switched on or off. The results of both methods correspond well; detected differences are qualitatively explained. It is documented that the plasma jet can be operated both in a subsonic and in a supersonic regime. We present the dependences of the plasma and neutral gas flow velocity on the distance from the cathode, on the pressure in the reactor chamber, and on the flow rate of the working gas. We present results from two mutually independent measurements of plasma and neutral gas flow velocities in a plasma jet deposition system. Operation of a hollow-cathode discharge within the plasma jet nozzle in the pulse regime enables the simple use of a classical Langmuir probe for the plasma flow velocity measurement. In this method, we assume that the plasma is generated solely inside the nozzle during the power impulse and we measure the time of flight of the ions along a known distance between the nozzle end and the probe. The plasma velocity at the plasma jet axis is then determined by differentiation of the dependence of the distance covered by ions on time. As the second method the well-known Pitot tube is used for measurement of the neutral gas velocity. By comparison of both methods we have experimentally proved that the neutral gas flow velocity is almost unaffected by the presence of the plasma, i.e. it does not substantially depend on whether the discharge is switched on or off. The results of both methods correspond well; detected differences are qualitatively explained. It is documented that the plasma jet can be operated both in a subsonic and in a supersonic regime. We present the dependences of the plasma and neutral gas flow velocity on the distance from the cathode, on the pressure in the reactor chamber, and on the flow rate of the working gas.
dcterms:title
Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system
skos:prefLabel
Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system
skos:notation
RIV/00216208:11320/13:10191416!RIV14-GA0-11320___
n3:predkladatel
n4:orjk%3A11320
n5:aktivita
n14:S n14:P n14:I
n5:aktivity
I, P(GAP205/11/0386), P(GD202/03/H162), S
n5:cisloPeriodika
1
n5:dodaniDat
n17:2014
n5:domaciTvurceVysledku
n16:6779263 n16:1276816 n16:2535777
n5:druhVysledku
n12:J
n5:duvernostUdaju
n20:S
n5:entitaPredkladatele
n8:predkladatel
n5:idSjednocenehoVysledku
86811
n5:idVysledku
RIV/00216208:11320/13:10191416
n5:jazykVysledku
n11:eng
n5:klicovaSlova
Plasma devices; Plasma dynamics and flow
n5:klicoveSlovo
n19:Plasma%20dynamics%20and%20flow n19:Plasma%20devices
n5:kodStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
n5:kontrolniKodProRIV
[7940F02ED820]
n5:nazevZdroje
Plasma Sources Science and Technology
n5:obor
n21:BL
n5:pocetDomacichTvurcuVysledku
3
n5:pocetTvurcuVysledku
3
n5:projekt
n6:GD202%2F03%2FH162 n6:GAP205%2F11%2F0386
n5:rokUplatneniVysledku
n17:2013
n5:svazekPeriodika
22
n5:tvurceVysledku
Tichý, Milan Kudrna, Pavel Klusoň, Jan
n5:wos
000314966300025
s:issn
0963-0252
s:numberOfPages
7
n10:doi
10.1088/0963-0252/22/1/015020
n13:organizacniJednotka
11320