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Statements

Subject Item
n2:RIV%2F00216208%3A11320%2F12%3A10129409%21RIV13-GA0-11320___
rdf:type
n7:Vysledek skos:Concept
rdfs:seeAlso
http://www.intechopen.com/books/atomic-force-microscopy-imaging-measuring-and-manipulating-surfaces-at-the-atomic-scale/afm-in-optical-imaging-and-characterization
dcterms:description
Atomic force microscopy and its advantages and disadvantages are presented in comparison with optical techniques (near-field optical microscopy and optical spectroscopic scatterometry), as well as their mutual cooperation. The methods are analyzed with respect to monitoring rough surfaces, critical dimensions and cross-sectional shapes of patterned nanostructures, and the linewidth and line-edge roughness of patterned elements. Atomic force microscopy and its advantages and disadvantages are presented in comparison with optical techniques (near-field optical microscopy and optical spectroscopic scatterometry), as well as their mutual cooperation. The methods are analyzed with respect to monitoring rough surfaces, critical dimensions and cross-sectional shapes of patterned nanostructures, and the linewidth and line-edge roughness of patterned elements.
dcterms:title
Atomic Force Microscopy in Optical Imaging and Characterization Atomic Force Microscopy in Optical Imaging and Characterization
skos:prefLabel
Atomic Force Microscopy in Optical Imaging and Characterization Atomic Force Microscopy in Optical Imaging and Characterization
skos:notation
RIV/00216208:11320/12:10129409!RIV13-GA0-11320___
n7:predkladatel
n11:orjk%3A11320
n3:aktivita
n10:P n10:Z
n3:aktivity
P(GP202/09/P355), P(GPP204/10/P346), Z(MSM0021620834)
n3:dodaniDat
n6:2013
n3:domaciTvurceVysledku
n20:7335644 n20:7005695
n3:druhVysledku
n23:C
n3:duvernostUdaju
n15:S
n3:entitaPredkladatele
n19:predkladatel
n3:idSjednocenehoVysledku
124021
n3:idVysledku
RIV/00216208:11320/12:10129409
n3:jazykVysledku
n24:eng
n3:klicovaSlova
line-edge roughness; critical dimensions; spectroscopic scatterometry; near-field microscopy; AFM
n3:klicoveSlovo
n18:line-edge%20roughness n18:near-field%20microscopy n18:spectroscopic%20scatterometry n18:AFM n18:critical%20dimensions
n3:kontrolniKodProRIV
[AED68D30E937]
n3:mistoVydani
Rijeka, Croatia
n3:nazevEdiceCisloSvazku
Atomic Force Microscopy, 3
n3:nazevZdroje
Atomic Force Microscopy - Imaging, Measuring and Manipulating Surfaces at the Atomic Scale
n3:obor
n22:BH
n3:pocetDomacichTvurcuVysledku
2
n3:pocetStranKnihy
256
n3:pocetTvurcuVysledku
2
n3:projekt
n13:GPP204%2F10%2FP346 n13:GP202%2F09%2FP355
n3:rokUplatneniVysledku
n6:2012
n3:tvurceVysledku
Antoš, Roman Veis, Martin
n3:zamer
n4:MSM0021620834
s:numberOfPages
20
n16:doi
10.5772/35559
n21:hasPublisher
InTech
n12:isbn
978-953-51-0414-8
n9:organizacniJednotka
11320