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Statements

Subject Item
n2:RIV%2F00216208%3A11320%2F11%3A10109807%21RIV12-GA0-11320___
rdf:type
skos:Concept n14:Vysledek
rdfs:seeAlso
http://www.mff.cuni.cz/veda/konference/wds/proc/pdf11/WDS11_221_f2_Kluson.pdf
dcterms:description
We present results from two mutualy independent measurements of flow velocity from the plasma jet nozzle outlet. Operation of the discharge in the pulse regime enables a simple use of the classical Langmuir probe for the flow velocity measurement. Previous probe measurements showed that in the space below the nozzle there is almost no electric field which could accelerate the ions and so we can assume that the propagation of positive ions towards the negatively biased probe is driven just by mutual collisions and the diffusion process. As the second method the well known Pitot tube was used. By this method we have experimentally proved that the flow velocity is almost not at all affected by the presence of plasma, i.e. it does not depend on the fact whether the discharge is on or off. Results of both metods are in a good correspondence. It was documented that the discharge can be operated both as subsonic and as supersonic one. The appropriate dependences of the flow velocity on the distance from the cathode, on the pressure in the reactor chamber and on the input flow of the working gas were measured. We present results from two mutualy independent measurements of flow velocity from the plasma jet nozzle outlet. Operation of the discharge in the pulse regime enables a simple use of the classical Langmuir probe for the flow velocity measurement. Previous probe measurements showed that in the space below the nozzle there is almost no electric field which could accelerate the ions and so we can assume that the propagation of positive ions towards the negatively biased probe is driven just by mutual collisions and the diffusion process. As the second method the well known Pitot tube was used. By this method we have experimentally proved that the flow velocity is almost not at all affected by the presence of plasma, i.e. it does not depend on the fact whether the discharge is on or off. Results of both metods are in a good correspondence. It was documented that the discharge can be operated both as subsonic and as supersonic one. The appropriate dependences of the flow velocity on the distance from the cathode, on the pressure in the reactor chamber and on the input flow of the working gas were measured.
dcterms:title
Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System
skos:prefLabel
Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System Measurement of the Gas Flow Velocity in the Low Pressure Hollow Cathode Plasma Jet Sputtering System
skos:notation
RIV/00216208:11320/11:10109807!RIV12-GA0-11320___
n14:predkladatel
n15:orjk%3A11320
n4:aktivita
n21:Z n21:S n21:P
n4:aktivity
P(GD202/08/H057), S, Z(MSM0021620834)
n4:dodaniDat
n11:2012
n4:domaciTvurceVysledku
n19:1276816 n19:6779263 n19:2535777
n4:druhVysledku
n6:D
n4:duvernostUdaju
n17:S
n4:entitaPredkladatele
n12:predkladatel
n4:idSjednocenehoVysledku
211103
n4:idVysledku
RIV/00216208:11320/11:10109807
n4:jazykVysledku
n24:eng
n4:klicovaSlova
Sputtering; Hollow cathode plasma jet
n4:klicoveSlovo
n8:Hollow%20cathode%20plasma%20jet n8:Sputtering
n4:kontrolniKodProRIV
[D5266900F244]
n4:mistoKonaniAkce
Praha
n4:mistoVydani
Praha
n4:nazevZdroje
WDS'11 Proceedings of Contributed Papers: Part II – Physics of Plasmas and Ionized Media
n4:obor
n13:BL
n4:pocetDomacichTvurcuVysledku
3
n4:pocetTvurcuVysledku
3
n4:projekt
n16:GD202%2F08%2FH057
n4:rokUplatneniVysledku
n11:2011
n4:tvurceVysledku
Klusoň, Jan Tichý, Milan Kudrna, Pavel
n4:typAkce
n18:EUR
n4:zahajeniAkce
2011-05-31+02:00
n4:zamer
n5:MSM0021620834
s:numberOfPages
6
n20:hasPublisher
Matfyzpress
n7:isbn
978-80-7378-185-9
n9:organizacniJednotka
11320