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Statements

Subject Item
n2:RIV%2F00177016%3A_____%2F14%3A%230001044%21RIV15-MSM-00177016
rdf:type
n11:Vysledek skos:Concept
dcterms:description
We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 x 200 x 10) mu m. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment. We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 x 200 x 10) mu m. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.
dcterms:title
Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy
skos:prefLabel
Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy
skos:notation
RIV/00177016:_____/14:#0001044!RIV15-MSM-00177016
n3:aktivita
n15:V
n3:aktivity
V
n3:cisloPeriodika
1
n3:dodaniDat
n16:2015
n3:domaciTvurceVysledku
n4:1739948 n4:2260387
n3:druhVysledku
n5:J
n3:duvernostUdaju
n14:S
n3:entitaPredkladatele
n12:predkladatel
n3:idSjednocenehoVysledku
44750
n3:idVysledku
RIV/00177016:_____/14:#0001044
n3:jazykVysledku
n10:eng
n3:klicovaSlova
nanometrology; nanopositioning interferometry; AFM; nanoscale
n3:klicoveSlovo
n6:nanopositioning%20interferometry n6:nanometrology n6:nanoscale n6:AFM
n3:kodStatuVydavatele
CH - Švýcarská konfederace
n3:kontrolniKodProRIV
[CE6D10FB930E]
n3:nazevZdroje
SENSORS
n3:obor
n17:BH
n3:pocetDomacichTvurcuVysledku
2
n3:pocetTvurcuVysledku
9
n3:rokUplatneniVysledku
n16:2014
n3:svazekPeriodika
14
n3:tvurceVysledku
Buchta, Zdeněk Lazar, Josef Klapetek, Petr Šerý, Mojmír Číp, Ondřej Čížek, Martin Oulehla, Jindřich Valtr, Miroslav Hrabina, Jan
n3:wos
000336039100048
s:issn
1424-8220
s:numberOfPages
10
n8:doi
10.3390/s140100877