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Statements

Subject Item
n2:RIV%2F00177016%3A_____%2F14%3A%230000840%21RIV15-MSM-00177016
rdf:type
n16:Vysledek skos:Concept
dcterms:description
The optical mirror is often used as a reference plane in coordinate metrology. Nevertheless, an optical system for straightness and tilting of translation stages can be replaced by a relatively cheap capacitive system. The setup with 1D scans for relative flatness measurement based on capacitive sensors is presented and compared with the absolute deflectometric method. The capacitive method is intended only for conductive targets or conductively coated optics. It can also be used for corrections or feedback in translation stages with nm precision. The optical mirror is often used as a reference plane in coordinate metrology. Nevertheless, an optical system for straightness and tilting of translation stages can be replaced by a relatively cheap capacitive system. The setup with 1D scans for relative flatness measurement based on capacitive sensors is presented and compared with the absolute deflectometric method. The capacitive method is intended only for conductive targets or conductively coated optics. It can also be used for corrections or feedback in translation stages with nm precision.
dcterms:title
Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages
skos:prefLabel
Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages
skos:notation
RIV/00177016:_____/14:#0000840!RIV15-MSM-00177016
n3:aktivita
n7:R n7:P
n3:aktivity
P(7AX12104), R
n3:cisloPeriodika
March
n3:dodaniDat
n9:2015
n3:domaciTvurceVysledku
n5:2920654
n3:druhVysledku
n10:J
n3:duvernostUdaju
n12:S
n3:entitaPredkladatele
n17:predkladatel
n3:idSjednocenehoVysledku
34735
n3:idVysledku
RIV/00177016:_____/14:#0000840
n3:jazykVysledku
n18:eng
n3:klicovaSlova
interferometry; capacitive distance measurement; flatness; three-flat test; translation stage; mirror; diffraction grating; deformation; layer
n3:klicoveSlovo
n11:mirror n11:interferometry n11:deformation n11:layer n11:diffraction%20grating n11:translation%20stage n11:flatness n11:three-flat%20test n11:capacitive%20distance%20measurement
n3:kodStatuVydavatele
GB - Spojené království Velké Británie a Severního Irska
n3:kontrolniKodProRIV
[B5D84B358E89]
n3:nazevZdroje
Measurement Science and Technology
n3:obor
n6:BH
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
1
n3:projekt
n8:7AX12104
n3:rokUplatneniVysledku
n9:2014
n3:svazekPeriodika
25
n3:tvurceVysledku
Křen, Petr
s:issn
1361-6501
s:numberOfPages
5
n14:doi
10.1088/0957-0233/25/4/044017