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Namespace Prefixes

PrefixIRI
n12http://linked.opendata.cz/ontology/domain/vavai/riv/typAkce/
dctermshttp://purl.org/dc/terms/
n15http://purl.org/net/nknouf/ns/bibtex#
n16http://linked.opendata.cz/resource/domain/vavai/riv/tvurce/
n6http://linked.opendata.cz/resource/domain/vavai/projekt/
n17http://linked.opendata.cz/ontology/domain/vavai/
shttp://schema.org/
n5http://linked.opendata.cz/ontology/domain/vavai/riv/
skoshttp://www.w3.org/2004/02/skos/core#
n9http://bibframe.org/vocab/
n11http://linked.opendata.cz/resource/domain/vavai/vysledek/RIV%2F00177016%3A_____%2F13%3A%230001046%21RIV15-MSM-00177016/
n2http://linked.opendata.cz/resource/domain/vavai/vysledek/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
n8http://linked.opendata.cz/ontology/domain/vavai/riv/klicoveSlovo/
n20http://linked.opendata.cz/ontology/domain/vavai/riv/duvernostUdaju/
xsdhhttp://www.w3.org/2001/XMLSchema#
n13http://linked.opendata.cz/ontology/domain/vavai/riv/jazykVysledku/
n7http://linked.opendata.cz/ontology/domain/vavai/riv/aktivita/
n19http://linked.opendata.cz/ontology/domain/vavai/riv/obor/
n14http://linked.opendata.cz/ontology/domain/vavai/riv/druhVysledku/
n18http://reference.data.gov.uk/id/gregorian-year/

Statements

Subject Item
n2:RIV%2F00177016%3A_____%2F13%3A%230001046%21RIV15-MSM-00177016
rdf:type
skos:Concept n17:Vysledek
dcterms:description
We present an overview of approaches to the design of nanometrology measuring setups with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. We present an overview of approaches to the design of nanometrology measuring setups with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
dcterms:title
Nanometrology interferometric coordinates measurement system for local probe microscopy Nanometrology interferometric coordinates measurement system for local probe microscopy
skos:prefLabel
Nanometrology interferometric coordinates measurement system for local probe microscopy Nanometrology interferometric coordinates measurement system for local probe microscopy
skos:notation
RIV/00177016:_____/13:#0001046!RIV15-MSM-00177016
n5:aktivita
n7:P n7:I n7:V
n5:aktivity
I, P(ED0017/01/01), P(EE2.4.31.0016), P(FR-TI2/705), P(GPP102/11/P820), P(TA01010995), P(TA02010711), P(TE01020233), V
n5:dodaniDat
n18:2015
n5:domaciTvurceVysledku
n16:2260387
n5:druhVysledku
n14:D
n5:duvernostUdaju
n20:S
n5:entitaPredkladatele
n11:predkladatel
n5:idSjednocenehoVysledku
90605
n5:idVysledku
RIV/00177016:_____/13:#0001046
n5:jazykVysledku
n13:eng
n5:klicovaSlova
Nanometrology; Interferometry; Traceability; Local probe microscopy; Nanopositioning
n5:klicoveSlovo
n8:Interferometry n8:Traceability n8:Nanometrology n8:Nanopositioning n8:Local%20probe%20microscopy
n5:kontrolniKodProRIV
[018E49B7F102]
n5:mistoKonaniAkce
Guiyang
n5:mistoVydani
Bellingham
n5:nazevZdroje
Sixth International Symposium on Precision Mechanical Measurements (Proceedings of SPIE 8916)
n5:obor
n19:JB
n5:pocetDomacichTvurcuVysledku
1
n5:pocetTvurcuVysledku
6
n5:projekt
n6:FR-TI2%2F705 n6:TA01010995 n6:EE2.4.31.0016 n6:ED0017%2F01%2F01 n6:TE01020233 n6:GPP102%2F11%2FP820 n6:TA02010711
n5:rokUplatneniVysledku
n18:2013
n5:tvurceVysledku
Hrabina, Jan Lazar, Josef Šerý, Mojmír Klapetek, Petr Číp, Ondřej Čížek, Martin
n5:typAkce
n12:WRD
n5:wos
000333050600011
n5:zahajeniAkce
2013-01-01+01:00
s:issn
0277-786X
s:numberOfPages
7
n9:doi
10.1117/12.2035477
n15:hasPublisher
SPIE