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Statements

Subject Item
n2:RIV%2F00177016%3A_____%2F12%3A%230000543%21RIV13-AV0-00177016
rdf:type
n6:Vysledek skos:Concept
rdfs:seeAlso
http://link.springer.com/article/10.2478%2Fs11534-011-0093-5
dcterms:description
We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
dcterms:title
Multiaxis interferometric displacement measurement for local probe microscopy Multiaxis interferometric displacement measurement for local probe microscopy
skos:prefLabel
Multiaxis interferometric displacement measurement for local probe microscopy Multiaxis interferometric displacement measurement for local probe microscopy
skos:notation
RIV/00177016:_____/12:#0000543!RIV13-AV0-00177016
n6:predkladatel
n10:ico%3A00177016
n3:aktivita
n16:P n16:Z
n3:aktivity
P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
n3:cisloPeriodika
10
n3:dodaniDat
n8:2013
n3:domaciTvurceVysledku
n20:2260387
n3:druhVysledku
n13:J
n3:duvernostUdaju
n19:S
n3:entitaPredkladatele
n21:predkladatel
n3:idSjednocenehoVysledku
152306
n3:idVysledku
RIV/00177016:_____/12:#0000543
n3:jazykVysledku
n11:eng
n3:klicovaSlova
interferometry; microscopy; nanometrology
n3:klicoveSlovo
n7:microscopy n7:nanometrology n7:interferometry
n3:kodStatuVydavatele
DE - Spolková republika Německo
n3:kontrolniKodProRIV
[4739C79332D3]
n3:nazevZdroje
Central European Journal of Physics
n3:obor
n14:JB
n3:pocetDomacichTvurcuVysledku
1
n3:pocetTvurcuVysledku
5
n3:projekt
n15:KAN311610701 n15:LC06007 n15:GA102%2F09%2F1276
n3:rokUplatneniVysledku
n8:2012
n3:svazekPeriodika
2012
n3:tvurceVysledku
Hrabina, Jan Šerý, Mojmír Klapetek, Petr Lazar, Josef Číp, Ondřej
n3:zamer
n5:AV0Z20650511
s:issn
1895-1082
s:numberOfPages
7
n18:doi
10.2478/s11534-011-0093-5