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Namespace Prefixes

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n14http://linked.opendata.cz/resource/domain/vavai/subjekt/
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Statements

Subject Item
n2:7H13003
rdf:type
n20:Projekt
rdfs:seeAlso
http://www.isvav.cz/projectDetail.do?rowId=7H13003
dcterms:description
The E450EDL project aims at the demonstration of 450mm readiness equipment ensuring the realization of a 450mm key enabling technology pilot line. The overall goal of the E450EDL project is to install a 450mm Equipment Demo Line at imec equipped with European systems implementing first critical modules. The E450EDL project aims at the demonstration of 450mm readiness equipment ensuring the realization of a 450mm key enabling technology pilot line. The overall goal of the E450EDL project is to install a 450mm Equipment Demo Line at imec equipped with European systems implementing first critical modules.
dcterms:title
European 450mm Equipment Demo Line European 450mm Equipment Demo Line
skos:notation
7H13003
n4:aktivita
n7:7H
n4:celkovaStatniPodpora
n15:celkovaStatniPodpora
n4:celkoveNaklady
n15:celkoveNaklady
n4:datumDodatniDoRIV
2015-03-20+01:00
n4:druhSouteze
n9:RP
n4:duvernostUdaju
n16:S
n4:fazeProjektu
n10:101112509
n4:hlavniObor
n17:JA
n4:kategorie
n6:AP
n4:klicovaSlova
450 mm technology; STEM; wafer metrology; electron optical simulations
n4:partnetrHlavni
n14:ico%3A46971629
n4:pocetKoordinujicichPrijemcu
0
n4:pocetPrijemcu
1
n4:pocetSpoluPrijemcu
0
n4:pocetVysledkuRIV
0
n4:pocetZverejnenychVysledkuVRIV
0
n4:posledniUvolneniVMinulemRoce
2014-02-14+01:00
n4:prideleniPodpory
n8:MSMT-28418%2F2013-5
n4:sberDatUcastniciPoslednihoRoku
n12:2015
n4:sberDatUdajeProjZameru
n12:2015
n4:statusZobrazovaneFaze
n19:DRRVB
n4:typPojektu
n13:P
n4:ukonceniReseni
2016-10-01+02:00
n4:zahajeniReseni
2013-10-01+02:00
n4:zivotniCyklusProjektu
n18:ZBB
n4:klicoveSlovo
450 mm technology wafer metrology STEM