Description
Metadata
Settings
About:
A function sample of modified reactor for boron diffusion with implemented injector and extractor and with shielding quartz elements for reduction of quartz reactor tube degradation and for increasing homogeneity of Si layers diffused by boron.
Permalink
an Entity references as follows:
Subject of Sentences In Document
Object of Sentences In Document
Explicit Coreferences
Implicit Coreferences
Entity
Attribute
Value
Rank
Faceted Search & Find service v1.16.118
Alternative Linked Data Documents:
ODE
Raw Data in:
CXML
|
CSV
| RDF (
N-Triples
N3/Turtle
JSON
XML
) | OData (
Atom
JSON
) | Microdata (
JSON
HTML
) |
JSON-LD
About
This work is licensed under a
Creative Commons Attribution-Share Alike 3.0 Unported License
.
OpenLink Virtuoso
version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 67 GB memory in use)
Copyright © 2009-2024 OpenLink Software