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Description
| - In this article, atomic force microscopy method was used for diagnostics of ultra-thin tungsten films which were deposited on silicon substrate. Radio frequency magnetron sputtering method was used for tungsten deposition on the surface. According to atomic forces between the tip and the sample, topographical structures were measured and imaged.
- In this article, atomic force microscopy method was used for diagnostics of ultra-thin tungsten films which were deposited on silicon substrate. Radio frequency magnetron sputtering method was used for tungsten deposition on the surface. According to atomic forces between the tip and the sample, topographical structures were measured and imaged. (en)
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Title
| - Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy
- Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy (en)
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skos:prefLabel
| - Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy
- Diagnostics of ultra-thin tungsten films on silicon substrate using atomic force microscopy (en)
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skos:notation
| - RIV/70883521:28140/14:43871862!RIV15-MSM-28140___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/70883521:28140/14:43871862
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - atomic force microscopy; tungsten; silicon; ultra-thin films (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - US - Spojené státy americké
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - International Journal of Materials
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Hruška, František
- Martínek, Tomáš
- Navrátil, Milan
- Sobota, Jaroslav
- Křesálek, Vojtěch
- Kudělka, Josef
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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