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Description
| - There is described simple experimental equipment for defective SiO2 (silanol and siloxane) surface treatment with the aim to remove the defects and improve the adhesion of photoresist on the appropriate surface. The spectral characteristics of the surface reaction of benzaldehyde, benzilchloride, benzoylchloride, p-isotiocyanatebenzaldehyde and o- nitrobenzaldehyde are summarized.
- There is described simple experimental equipment for defective SiO2 (silanol and siloxane) surface treatment with the aim to remove the defects and improve the adhesion of photoresist on the appropriate surface. The spectral characteristics of the surface reaction of benzaldehyde, benzilchloride, benzoylchloride, p-isotiocyanatebenzaldehyde and o- nitrobenzaldehyde are summarized. (en)
- V tomto článku je prezentován popis jednoduchého experimentálního zařízení pro zpracování defektního SiO2 (silanolového a siloxanového) povrchu s cílem odstranit defekty a zlepšit adhezi fotoresistu na příslušném povrchu. Souhrn spektrální charakteristiky povrchových reakcí benzaldehydu, benzilchloridu, benzylchloridu, p-izotiocyanatobenzldehydu a o-nitrobenzaldehydu dokazuje efekt povrchového zpracování defektního SiO2. (cs)
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Title
| - Transformation of Aromatic Compounds on Pyrolytic Si/SiO2 Surfaces. II. Experimental Study
- Transformation of Aromatic Compounds on Pyrolytic Si/SiO2 Surfaces. II. Experimental Study (en)
- Proměny aromatických sloučenin na pyrolytických Si/SiO2 površích. II. Experimentální Studie (cs)
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skos:prefLabel
| - Transformation of Aromatic Compounds on Pyrolytic Si/SiO2 Surfaces. II. Experimental Study
- Transformation of Aromatic Compounds on Pyrolytic Si/SiO2 Surfaces. II. Experimental Study (en)
- Proměny aromatických sloučenin na pyrolytických Si/SiO2 površích. II. Experimentální Studie (cs)
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skos:notation
| - RIV/70883521:28110/06:63504763!RIV07-MSM-28110___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/70883521:28110/06:63504763
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - hydrofobization; silane and siloxane defects; SiO2 pyrolitic surface; aromatic aldehydes benzaldehyde; benzilchloride; benzoylchloride; p-isotiocyanatebenzaldehyde o- nitrobenzaldehyde (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - SILICON 2006 The Tenth Scientific and Business Conference
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Lapčík, Lubomír
- Lapčíková, Barbora
- Minařík, Antonín
- Pelikán, Peter
- Macháčková, Alena
- Vojtěchovský, Karel
- Čeppan, Michal
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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is http://linked.open...avai/riv/vysledek
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