About: Study of Thin TiCxN1-x Films Fabricated by Hybrid Magnetron-Laser Deposition     Goto   Sponge   NotDistinct   Permalink

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  • Titanium- carbonitride thin films were grown at room temperature using a hybrid deposition arrangement combining DC magnetron sputtering and KrF pulsed laser deposition (MSPLD). Carbon and titanium were simultaneously deposited on the same Si substrate, dimensions of 3 cm x 3 cm. Films were fabricated in argon-nitrogen atmosphere of 1 Pa - 5 Pa, for laser fluence of 15 Jcm(-2) and magnetron power of 150 W. Film properties were modified by RF discharge held between the target and substrate. Film crystallinity was studied by XRD and the composition depth profile of TiCN layers by glow discharge optical emission spectroscopy (GDOES).
  • Titanium- carbonitride thin films were grown at room temperature using a hybrid deposition arrangement combining DC magnetron sputtering and KrF pulsed laser deposition (MSPLD). Carbon and titanium were simultaneously deposited on the same Si substrate, dimensions of 3 cm x 3 cm. Films were fabricated in argon-nitrogen atmosphere of 1 Pa - 5 Pa, for laser fluence of 15 Jcm(-2) and magnetron power of 150 W. Film properties were modified by RF discharge held between the target and substrate. Film crystallinity was studied by XRD and the composition depth profile of TiCN layers by glow discharge optical emission spectroscopy (GDOES). (en)
Title
  • Study of Thin TiCxN1-x Films Fabricated by Hybrid Magnetron-Laser Deposition
  • Study of Thin TiCxN1-x Films Fabricated by Hybrid Magnetron-Laser Deposition (en)
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  • Study of Thin TiCxN1-x Films Fabricated by Hybrid Magnetron-Laser Deposition
  • Study of Thin TiCxN1-x Films Fabricated by Hybrid Magnetron-Laser Deposition (en)
skos:notation
  • RIV/68407700:21460/05:00117729!RIV10-MSM-21460___
http://linked.open...avai/riv/aktivita
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  • 545297
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  • RIV/68407700:21460/05:00117729
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  • magnetron; laser; deposition; TiCxN1-x films (en)
http://linked.open.../riv/klicoveSlovo
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  • [68D1B3549096]
http://linked.open...v/mistoKonaniAkce
  • Prague
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  • Praha
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  • Photonics Prague 2005
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  • Jelínek, Miroslav
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http://linked.open...ain/vavai/riv/wos
  • 000236543600016
http://linked.open.../riv/zahajeniAkce
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  • Agentura Action
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  • 80-86742-08-3
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  • 21460
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