About: Fabrication of periodically ordered diamond nanostructures by microsphere lithography

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with the assistance of lithographic techniques. In this paper, we demonstrate the growth of diamond structures well ordered in periodic arrays. The technological process starts with ultrasonic seeding of Si substrates by ultra-dispersed detonation diamond nanoparticles. Then, a monolayer of polystyrene microspheres (PS) is deposited on seeded Si substrates by Langmuir-Blodgett method. The primary diameter of PS varies from 253 to 940nm. The self-assembled PS are employed as a mechanical mask for reactive ion etching of the seeding layer via reducing the PS diameter down. The seeding structures remained under reduced PS were used for growing periodically ordered diamond arrays by microwave plasma-assisted chemical vapor deposition from a hydrogen rich gas mixture. Cross-section SEM images reveal that the diameter and size of the formed diamond structures increase both in vertical and lateral direction. At a certain deposition time, the structures start to coalesce into a continuous layer. Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with the assistance of lithographic techniques. In this paper, we demonstrate the growth of diamond structures well ordered in periodic arrays. The technological process starts with ultrasonic seeding of Si substrates by ultra-dispersed detonation diamond nanoparticles. Then, a monolayer of polystyrene microspheres (PS) is deposited on seeded Si substrates by Langmuir-Blodgett method. The primary diameter of PS varies from 253 to 940nm. The self-assembled PS are employed as a mechanical mask for reactive ion etching of the seeding layer via reducing the PS diameter down. The seeding structures remained under reduced PS were used for growing periodically ordered diamond arrays by microwave plasma-assisted chemical vapor deposition from a hydrogen rich gas mixture. Cross-section SEM images reveal that the diameter and size of the formed diamond structures increase both in vertical and lateral direction. At a certain deposition time, the structures start to coalesce into a continuous layer. (en)
Title	Fabrication of periodically ordered diamond nanostructures by microsphere lithography Fabrication of periodically ordered diamond nanostructures by microsphere lithography (en)
skos:prefLabel	Fabrication of periodically ordered diamond nanostructures by microsphere lithography Fabrication of periodically ordered diamond nanostructures by microsphere lithography (en)
skos:notation	RIV/68407700:21340/14:00223275!RIV15-MSM-21340___
http://linked.open...avai/riv/aktivita	I P S
http://linked.open...avai/riv/aktivity	I, P(GA13-20110S), P(GBP108/12/G108), S
http://linked.open...iv/cisloPeriodika	12
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Proška, Jan Štolcová, Lucie
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta jaderná a fyzikálně inženýrská
http://linked.open...dnocenehoVysledku	16292
http://linked.open...ai/riv/idVysledku	RIV/68407700:21340/14:00223275
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	CVD growth; diamond; microsphere lithography; selective area deposition (en)
http://linked.open.../riv/klicoveSlovo	diamond CVD growth microsphere lithography selective area deposition
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[1493E219214C]
http://linked.open...i/riv/nazevZdroje	physica status solidi (b)
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by radiation New substrates and approaches for sensitive and reproducible biomolecular sensing by means of surface-enhanced Raman scattering (SERS) spectroscopy
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	251
http://linked.open...iv/tvurceVysledku	Proška, Jan Kromka, A. Štolcová, Lucie Domonkos, Mária Ižák, T.
http://linked.open...ain/vavai/riv/wos	000345830900044
issn	0370-1972
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1002/pssb.201451172
http://localhost/t...ganizacniJednotka	21340

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