About: Slumping of Si wafers at high temperature

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Space X-ray imaging telescopes have delivered unique observations that have been significantly contributing to many important discoveries of current astrophysics. For future telescopes with a larger collecting area and a better angular resolution, the limiting factor is their X-ray reflecting mirror array. Therefore, for a successful construction of future lightweight and highly reflecting X-ray mirrors, new cost-effective technologies and progressive materials are needed. Currently, the very promising materials are silicon foils which are commercially produced on a large scale. We focused on the plastic deformation of thin monocrystalline silicon foils, which was necessary for the precise thermal forming of the foils to 3D shapes. To achieve the plastic deformation, we applied forced slumping at temperatures from 1200 to 1400°C. The final shapes and the surface quality of the foils were measured using a Taylor Hobson contact profilometer and examined with an Atomic Forced Microscopy. We studied the effects of temperature, applied slumping force, heattreatment time, crystal orientation, and furnace atmosphere on the shape and surface quality of the formed foils. Space X-ray imaging telescopes have delivered unique observations that have been significantly contributing to many important discoveries of current astrophysics. For future telescopes with a larger collecting area and a better angular resolution, the limiting factor is their X-ray reflecting mirror array. Therefore, for a successful construction of future lightweight and highly reflecting X-ray mirrors, new cost-effective technologies and progressive materials are needed. Currently, the very promising materials are silicon foils which are commercially produced on a large scale. We focused on the plastic deformation of thin monocrystalline silicon foils, which was necessary for the precise thermal forming of the foils to 3D shapes. To achieve the plastic deformation, we applied forced slumping at temperatures from 1200 to 1400°C. The final shapes and the surface quality of the foils were measured using a Taylor Hobson contact profilometer and examined with an Atomic Forced Microscopy. We studied the effects of temperature, applied slumping force, heattreatment time, crystal orientation, and furnace atmosphere on the shape and surface quality of the formed foils. (en)
Title	Slumping of Si wafers at high temperature Slumping of Si wafers at high temperature (en)
skos:prefLabel	Slumping of Si wafers at high temperature Slumping of Si wafers at high temperature (en)
skos:notation	RIV/68407700:21340/13:00212409!RIV14-MSM-21340___
http://linked.open...avai/predkladatel	Fakulta jaderná a fyzikálně inženýrská
http://linked.open...avai/riv/aktivita	I P V
http://linked.open...avai/riv/aktivity	I, P(GA13-33324S), V
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Pína, Ladislav Švéda, Libor Havlíková, Radka
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta jaderná a fyzikálně inženýrská
http://linked.open...dnocenehoVysledku	105629
http://linked.open...ai/riv/idVysledku	RIV/68407700:21340/13:00212409
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Plastic deformation; Silicon; Thermal forming; X-ray telescope (en)
http://linked.open.../riv/klicoveSlovo	Plastic deformation Silicon Thermal forming X-ray telescope
http://linked.open...ontrolniKodProRIV	[C18415715469]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Bellingham (stát Washington)
http://linked.open...i/riv/nazevZdroje	Proceedings of SPIE Vol. 8777 Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III
http://linked.open...in/vavai/riv/obor	JJ
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	11 (xsd:int)
http://linked.open...vavai/riv/projekt	Lobster Eye X-Ray Monitor
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Hudec, René Lyutakov, O. Maršíková, V. Pína, Ladislav Havlíková, Radka Inneman, Adolf Sofer, Z. Švéda, Libor Šimek, P. Mika, M. Jankovsky, O.
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2013-04-15 (xsd:date)
issn	0277-786X
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.1117/12.2021586
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	978-0-8194-9579-2
http://localhost/t...ganizacniJednotka	21340

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