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  • Three technological approaches of selected area deposition that caused minimal damage for substrate surface are reviewed in the article. The advantages and limitations of proposed approaches are pointed out.
  • Three technological approaches of selected area deposition that caused minimal damage for substrate surface are reviewed in the article. The advantages and limitations of proposed approaches are pointed out. (en)
Title
  • Towards Surface-Friendly Treatment of Seeding Layer and Selected-Area Diamond Growth
  • Towards Surface-Friendly Treatment of Seeding Layer and Selected-Area Diamond Growth (en)
skos:prefLabel
  • Towards Surface-Friendly Treatment of Seeding Layer and Selected-Area Diamond Growth
  • Towards Surface-Friendly Treatment of Seeding Layer and Selected-Area Diamond Growth (en)
skos:notation
  • RIV/68407700:21340/10:00175021!RIV13-MSM-21340___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1M06002), P(IAAX00100902), P(KAN400100701), P(KAN400480701), P(LC510), S, Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika
  • 247
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Babchenko, Oleg
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 293146
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21340/10:00175021
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • UV lithography; plasma etching; selective diamond growth (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [601EDACF1963]
http://linked.open...i/riv/nazevZdroje
  • Physica Status Solidí
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http://linked.open...v/svazekPeriodika
  • -
http://linked.open...iv/tvurceVysledku
  • Babchenko, Oleg
  • Kromka, Alexander
  • Hruška, K.
  • Ledinský, M.
  • Rezek, B.
  • Ižák, T.
http://linked.open...ain/vavai/riv/wos
  • 000285798400091
http://linked.open...n/vavai/riv/zamer
issn
  • 0370-1972
number of pages
http://bibframe.org/vocab/doi
  • 10.1002/pssb.201000124
http://localhost/t...ganizacniJednotka
  • 21340
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