About: Characterization of W-O Coatings Deposited by Magnetron Sputtering with Reactive Gas Pulsing

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Charakterizace WO vrstev deponovaných magnetronovým naprašováním s pulzováním reaktivního plynu (cs) In this study, tungsten oxide coatings were deposited by dc magnetron sputtering onto steel, glass and silica substrates using either a conventional process (constant flow of oxygen) or pulsing of reactive gas (RGP). A square wave regulation signal with different pulsing period (T) and oxygen injection time (t(on)) was used in RGP. The partial pressure of argon was kept constant for all depositions. Three series of coatings were prepared: two with constant T and increasing t(on) and one with different T and constant t(on)/T ratio. The chemical composition, morphology and structure of these coatings were analyzed by electron probe microanalysis, scanning electron microscope (SEM) and X-ray diffraction, respectively. Preliminary studies have shown a linear relationship between t(on)/T and the oxygen content ratio (O/W) in the coatings. In this study, tungsten oxide coatings were deposited by dc magnetron sputtering onto steel, glass and silica substrates using either a conventional process (constant flow of oxygen) or pulsing of reactive gas (RGP). A square wave regulation signal with different pulsing period (T) and oxygen injection time (t(on)) was used in RGP. The partial pressure of argon was kept constant for all depositions. Three series of coatings were prepared: two with constant T and increasing t(on) and one with different T and constant t(on)/T ratio. The chemical composition, morphology and structure of these coatings were analyzed by electron probe microanalysis, scanning electron microscope (SEM) and X-ray diffraction, respectively. Preliminary studies have shown a linear relationship between t(on)/T and the oxygen content ratio (O/W) in the coatings. (en)
Title	Characterization of W-O Coatings Deposited by Magnetron Sputtering with Reactive Gas Pulsing Characterization of W-O Coatings Deposited by Magnetron Sputtering with Reactive Gas Pulsing (en) Charakterizace WO vrstev deponovaných magnetronovým naprašováním s pulzováním reaktivního plynu (cs)
skos:prefLabel	Characterization of W-O Coatings Deposited by Magnetron Sputtering with Reactive Gas Pulsing Characterization of W-O Coatings Deposited by Magnetron Sputtering with Reactive Gas Pulsing (en) Charakterizace WO vrstev deponovaných magnetronovým naprašováním s pulzováním reaktivního plynu (cs)
skos:notation	RIV/68407700:21260/07:06139532!RIV08-MSM-21260___
http://linked.open.../vavai/riv/strany	5481;5486
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM6840770038)
http://linked.open...iv/cisloPeriodika	9-11
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Polcar, Tomáš
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta dopravní
http://linked.open...dnocenehoVysledku	413366
http://linked.open...ai/riv/idVysledku	RIV/68407700:21260/07:06139532
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	oxygen pulsing; reactive magnetron sputtering; tungsten oxide (en)
http://linked.open.../riv/klicoveSlovo	oxygen pulsing reactive magnetron sputtering tungsten oxide
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[B49484F0D408]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	JI
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	207
http://linked.open...iv/tvurceVysledku	Cavaleiro, A. Polcar, Tomáš Parreira, N. M. G.
http://linked.open...n/vavai/riv/zamer	Decision Making and Control for Manufacturing III
issn	0257-8972
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	21260
is http://linked.open...avai/riv/vysledek of	Characterization of W-O Coatings Deposited by Magnetron Sputtering with Reactive Gas Pulsing Characterization of W-O Coatings Deposited by Magnetron Sputtering with Reactive Gas Pulsing Characterization of W-O Coatings Deposited by Magnetron Sputtering with Reactive Gas Pulsing

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