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Description
| - Tungsten oxynitride films (W-O-N) were prepared by DC reactive magnetron sputtering in a wide range of compositions from tungsten nitride (WN) to tungsten oxide (WO3), by changing the oxygen and nitrogen flows, fO2 and fN2, respectively, and their electrical and optical properties were evaluated with respect to the structure.
- Tungsten oxynitride films (W-O-N) were prepared by DC reactive magnetron sputtering in a wide range of compositions from tungsten nitride (WN) to tungsten oxide (WO3), by changing the oxygen and nitrogen flows, fO2 and fN2, respectively, and their electrical and optical properties were evaluated with respect to the structure. (en)
- Optické a elektrické vlastnosti WON vrstev deponovaných dc magnetronem byly nalyzovány s ohledem na jejich strukturu. (cs)
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Title
| - Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering
- Optické a elektrické vlastnosti WON vrstev deponovaných dc magnetronem (cs)
- Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering (en)
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skos:prefLabel
| - Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering
- Optické a elektrické vlastnosti WON vrstev deponovaných dc magnetronem (cs)
- Optical and Electrical Properties of W-O-N Coatings Deposited by DC Reactive Sputtering (en)
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skos:notation
| - RIV/68407700:21260/07:06139519!RIV08-MSM-21260___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68407700:21260/07:06139519
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - electrical properties; optical properties; oxinitrides; sputtering; structural characterization (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - DE - Spolková republika Německo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Plasma Processes and Polymers
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Cavaleiro, A.
- Martin, N.
- Polcar, Tomáš
- Parreira, N. M. G.
- Banakh, O.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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