About: Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing     Goto   Sponge   NotDistinct   Permalink

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Description
  • Studie se zabývá pulsováním reaktivního plynu při magnetronovém naprašování a jeho vlivu na depoziční parametry; v tomto případě byl pužit W terč a kyslík jako reaktivní plyn. (cs)
  • In this report, the concept of periodically switching the RG flow between two different values is applied to the deposition of tungsten oxide. The trends in the measured time dependent RG pressure and discharge voltage are reproduced by a dynamical model developed for this process.
  • In this report, the concept of periodically switching the RG flow between two different values is applied to the deposition of tungsten oxide. The trends in the measured time dependent RG pressure and discharge voltage are reproduced by a dynamical model developed for this process. (en)
Title
  • Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
  • Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing (en)
  • Modelování magnetronového naprašování oxidu wolframu s pulsováním reaktivního plynu (cs)
skos:prefLabel
  • Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
  • Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing (en)
  • Modelování magnetronového naprašování oxidu wolframu s pulsováním reaktivního plynu (cs)
skos:notation
  • RIV/68407700:21260/07:06139516!RIV08-MSM-21260___
http://linked.open.../vavai/riv/strany
  • 522;526
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM6840770038)
http://linked.open...iv/cisloPeriodika
  • S1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 434414
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21260/07:06139516
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • dynamic model; reactive process; sputtering; tungsten oxide (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [53137A8D1E1E]
http://linked.open...i/riv/nazevZdroje
  • Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 4
http://linked.open...iv/tvurceVysledku
  • Cavaleiro, A.
  • Polcar, Tomáš
  • Berg, S.
  • Nyberg, T.
  • Kubart, T.
  • Parreira, N. M. G.
  • Kappertz, O.
http://linked.open...n/vavai/riv/zamer
issn
  • 1612-8850
number of pages
http://localhost/t...ganizacniJednotka
  • 21260
is http://linked.open...avai/riv/vysledek of
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