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  • Cílem prezentované práce je porovnání povlaků na bázi oxidu titanu, které byly připraveny metodami PVD a PECVD. Kromě standardní charakterizace povlaků, jako je mikrotvrdost či adheze, byl studován třecí součinitel a míra otěru na tribometru pin-on-disc. Morfologie a struktura povlaků byla studována pomocí SEM a XRD, chemické složení pomocí ESCA, RBS a ERDA. (cs)
  • The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapour deposition (PVD) and plasma enhanced chemical vapour deposition (PECVD) from various precursors. The tribological measurements were provided by ball-on-disc tribometer allowing measuring the dependency of friction coefficient on cycles. The coating morphology and structure were investigated by scanning electron microscopy (SEM) and RTG analysis. Chemical composition of the layers was studied by infrared spectroscopy, electron spectroscopy for chemical analyses (ESCA), Ruthreford back scattering (RBS) and elastic recoil detection analysis (ERDA).
  • The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapour deposition (PVD) and plasma enhanced chemical vapour deposition (PECVD) from various precursors. The tribological measurements were provided by ball-on-disc tribometer allowing measuring the dependency of friction coefficient on cycles. The coating morphology and structure were investigated by scanning electron microscopy (SEM) and RTG analysis. Chemical composition of the layers was studied by infrared spectroscopy, electron spectroscopy for chemical analyses (ESCA), Ruthreford back scattering (RBS) and elastic recoil detection analysis (ERDA). (en)
Title
  • Comparison of Titanium Oxide Coatings Deposited by PVD and
  • Srovnání povlaků TiO deponovaných metodami PVD a PECVD (cs)
  • Comparison of Titanium Oxide Coatings Deposited by PVD and (en)
skos:prefLabel
  • Comparison of Titanium Oxide Coatings Deposited by PVD and
  • Srovnání povlaků TiO deponovaných metodami PVD a PECVD (cs)
  • Comparison of Titanium Oxide Coatings Deposited by PVD and (en)
skos:notation
  • RIV/68407700:21260/05:06115254!RIV08-MSM-21260___
http://linked.open.../vavai/riv/strany
  • 538;542
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • S
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 515942
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21260/05:06115254
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • PECVD; PVD; Titanium oxide; Tribology (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [EC7AC173A555]
http://linked.open...v/mistoKonaniAkce
  • Detroit
http://linked.open...i/riv/mistoVydani
  • Detroit
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  • SVC - 47th Annual Technical Conference Proceedings
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http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Polcar, Tomáš
  • Špatenka, P.
  • Macková, A.
  • Krumeich, J.
  • Kolouch, A.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Society of Vacuum Coaters
https://schema.org/isbn
  • 1-59124-779-9
http://localhost/t...ganizacniJednotka
  • 21260
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