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  • The work is concerned about thin film prepared by methods of physical vapor deposition. The thin film aluminum layers were prepared, measured and analyzed. Tested layers were deposited by technology of sputtering from aluminum target on glass substrate. The properties of thin film layers such as electrical resistance and thickness were measured. The thickness of layer was evaluated from scanned profile of sample surface by stylus method. Obtained experimental data were investigated in dependence to parameters of depositing process. The different conditions of sputtering process used for sample preparation were set up by combinations of power of plasma and time of deposition process.
  • The work is concerned about thin film prepared by methods of physical vapor deposition. The thin film aluminum layers were prepared, measured and analyzed. Tested layers were deposited by technology of sputtering from aluminum target on glass substrate. The properties of thin film layers such as electrical resistance and thickness were measured. The thickness of layer was evaluated from scanned profile of sample surface by stylus method. Obtained experimental data were investigated in dependence to parameters of depositing process. The different conditions of sputtering process used for sample preparation were set up by combinations of power of plasma and time of deposition process. (en)
Title
  • The Sputtered Aluminium Thin Film
  • The Sputtered Aluminium Thin Film (en)
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  • The Sputtered Aluminium Thin Film
  • The Sputtered Aluminium Thin Film (en)
skos:notation
  • RIV/68407700:21230/14:00224699!RIV15-MSM-21230___
http://linked.open...avai/riv/aktivita
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  • V
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  • 46866
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  • RIV/68407700:21230/14:00224699
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  • aluminium; resistance; sputtering; thin film (en)
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  • [8AD2F7E49200]
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  • Brno
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  • Brno
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  • Electronic Devices and Systems IMAPS CS International Conference 2014
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  • Beshajová Pelikánová, Ivana
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number of pages
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  • Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
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  • 978-80-214-4985-5
http://localhost/t...ganizacniJednotka
  • 21230
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