About: FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.scientific.net/KEM.605.569.pdf
Description	The objective of this paper is to present simulation results of the Thickness Shear Mode (TSM) resonator based on quartz using finite element simulation method. 3D model of quartz resonator and simulations were completed using finite element method in CoventorWare software suite for design and simulation of MEMS devices. Different techniques for simulation of adsorption effect on selective layer were studied: influence of change in mass of the sensitive layer and influence of change in density of the sensitive layer. Analyses of resonant modes were performed for both cases and displacement profiles in selected modes were determined for the resonator under study. Impedance and phase characteristics were calculated and measured for clean sample and sample with selective layer coated. The adsorption model calculates the frequency shift in basic resonant frequency with adsorbed amount of sensed gas. The simulation results were used in design of gas sensors for dangerous substances detection. The objective of this paper is to present simulation results of the Thickness Shear Mode (TSM) resonator based on quartz using finite element simulation method. 3D model of quartz resonator and simulations were completed using finite element method in CoventorWare software suite for design and simulation of MEMS devices. Different techniques for simulation of adsorption effect on selective layer were studied: influence of change in mass of the sensitive layer and influence of change in density of the sensitive layer. Analyses of resonant modes were performed for both cases and displacement profiles in selected modes were determined for the resonator under study. Impedance and phase characteristics were calculated and measured for clean sample and sample with selective layer coated. The adsorption model calculates the frequency shift in basic resonant frequency with adsorbed amount of sensed gas. The simulation results were used in design of gas sensors for dangerous substances detection. (en)
Title	FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications (en)
skos:prefLabel	FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications FEM Simulation of Quartz Thickness Shear Mode Resonator for Gas Sensing Applications (en)
skos:notation	RIV/68407700:21230/14:00210351!RIV15-MV0-21230___
http://linked.open...avai/riv/aktivita	P S
http://linked.open...avai/riv/aktivity	P(VG20102015015), S
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Kulha, Pavel Laposa, Igor Husák, Miroslav Laposa, Alexandr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta elektrotechnická
http://linked.open...dnocenehoVysledku	16625
http://linked.open...ai/riv/idVysledku	RIV/68407700:21230/14:00210351
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	piezoelectric simulation; QCM; chemical sensors; finite element method (en)
http://linked.open.../riv/klicoveSlovo	chemical sensors finite element method QCM piezoelectric simulation
http://linked.open...ontrolniKodProRIV	[03CFD91D0ACA]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Zürich
http://linked.open...i/riv/nazevZdroje	IC-MAST - 3rd International Conference on Materials and Applications for Sensors and Transducers
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Miniature intelligent system for analyzing concentrations of gases and pollutants, particularly toxic
http://linked.open...UplatneniVysledku	2014
http://linked.open...iv/tvurceVysledku	Husák, Miroslav Kulha, Pavel Laposa, Alexandr Laposa, Igor
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open...ain/vavai/riv/wos	000348035600140
http://linked.open.../riv/zahajeniAkce	2013-09-13 (xsd:date)
issn	1013-9826
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.4028/www.scientific.net/KEM.605.569
http://purl.org/ne...btex#hasPublisher	Transtech Publications
https://schema.org/isbn	9783038350514
http://localhost/t...ganizacniJednotka	21230

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