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  • Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications (sensors, heat sink, optical mirrors, cold cathode, tissue engineering, etc.). Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures (800-900 °C), what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a nanocrystalline diamond (NCD) growth from the H2/CH4/CO2 gas mixture at low temperature (400 °C) by pulsed linear antenna microwave plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia (NH3) at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor.
  • Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications (sensors, heat sink, optical mirrors, cold cathode, tissue engineering, etc.). Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures (800-900 °C), what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a nanocrystalline diamond (NCD) growth from the H2/CH4/CO2 gas mixture at low temperature (400 °C) by pulsed linear antenna microwave plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia (NH3) at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor. (en)
Title
  • Fabrication of diamond based quartz crystal microbalance gas sensor
  • Fabrication of diamond based quartz crystal microbalance gas sensor (en)
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  • Fabrication of diamond based quartz crystal microbalance gas sensor
  • Fabrication of diamond based quartz crystal microbalance gas sensor (en)
skos:notation
  • RIV/68407700:21230/14:00209766!RIV15-MSM-21230___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(GAP108/11/0794), S
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 16287
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  • RIV/68407700:21230/14:00209766
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • diamond thin film; low temperature deposition; quartz crystal microbalance; gas sensor (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [C57DB0EBA066]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Zürich
http://linked.open...i/riv/nazevZdroje
  • IC-MAST - 3rd International Conference on Materials and Applications for Sensors and Transducers
http://linked.open...in/vavai/riv/obor
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http://linked.open...iv/tvurceVysledku
  • Husák, Miroslav
  • Kulha, Pavel
  • Varga, M.
  • Kroutil, Jiří
  • Laposa, Alexandr
  • Kromka, A.
  • Davydova, M.
http://linked.open...vavai/riv/typAkce
http://linked.open...ain/vavai/riv/wos
  • 000348035600145
http://linked.open.../riv/zahajeniAkce
issn
  • 1013-9826
number of pages
http://bibframe.org/vocab/doi
  • 10.4028/www.scientific.net/KEM.605.589
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  • Transtech Publications
https://schema.org/isbn
  • 9783038350514
http://localhost/t...ganizacniJednotka
  • 21230
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