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Description
  • The paper presents design methodology and fabrication process of piezoelectric generator with thin-film Zinc Oxide (ZnO) layer. The design methodology utilizing FEM simulations is presented. Modeling and simulation of mechanical stresses, resonant frequencies, vibration modes and magnitude of generated voltage is virtually essential for any design of MEMS energy harvesting structures. CoventorWare software package was used as a very strong tool in the structure design. Simulation results opens the possibility for optimization of shape and position of the piezoelectric elements on the deformation transducer to achieve the maximum sensitivity and performance.
  • The paper presents design methodology and fabrication process of piezoelectric generator with thin-film Zinc Oxide (ZnO) layer. The design methodology utilizing FEM simulations is presented. Modeling and simulation of mechanical stresses, resonant frequencies, vibration modes and magnitude of generated voltage is virtually essential for any design of MEMS energy harvesting structures. CoventorWare software package was used as a very strong tool in the structure design. Simulation results opens the possibility for optimization of shape and position of the piezoelectric elements on the deformation transducer to achieve the maximum sensitivity and performance. (en)
Title
  • Design and Fabrication of Piezoelectric Generator with Thin ZNO Layer
  • Design and Fabrication of Piezoelectric Generator with Thin ZNO Layer (en)
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  • Design and Fabrication of Piezoelectric Generator with Thin ZNO Layer
  • Design and Fabrication of Piezoelectric Generator with Thin ZNO Layer (en)
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  • RIV/68407700:21230/12:00198314!RIV13-GA0-21230___
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  • P(GA102/09/1601)
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  • 130249
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  • RIV/68407700:21230/12:00198314
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  • zinc oxide; piezoelectric generator (en)
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  • [6AB7B0DA32EF]
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  • Brno
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  • Brno
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  • Proceedings of Electronic Devices and Systems EDS 2012
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  • Husák, Miroslav
  • Kulha, Pavel
  • Šutta, P.
  • Novák, P.
  • Prušáková, L.
  • Splitek, R.
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number of pages
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  • Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
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  • 978-80-214-4539-0
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  • 21230
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