About: Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide

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Description	The effect of peak power in a high power impulse magnetron sputtering (HiPIMS) reactive deposition of TiO2 films has been studied with respect to the deposition rate and coating properties. With increasing peak power not only the ionization of the sputtered material increases but also their energy. In order to correlate the variation in the ion energy distributions with the film properties, the phase composition, density and optical properties of the films grown with different HiPIMS-parameters have been investigated and compared to a film grown using direct current magnetron sputtering (DCMS). All experiments were performed for constant average power and pulse on time (100W and 35 μs, respectively), different peak powers were achieved by varying the frequency of pulsing. Ion energy distributions for Ti and O and its dependence on the process conditions have been studied. The effect of peak power in a high power impulse magnetron sputtering (HiPIMS) reactive deposition of TiO2 films has been studied with respect to the deposition rate and coating properties. With increasing peak power not only the ionization of the sputtered material increases but also their energy. In order to correlate the variation in the ion energy distributions with the film properties, the phase composition, density and optical properties of the films grown with different HiPIMS-parameters have been investigated and compared to a film grown using direct current magnetron sputtering (DCMS). All experiments were performed for constant average power and pulse on time (100W and 35 μs, respectively), different peak powers were achieved by varying the frequency of pulsing. Ion energy distributions for Ti and O and its dependence on the process conditions have been studied. (en)
Title	Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide (en)
skos:prefLabel	Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide (en)
skos:notation	RIV/68407700:21230/11:00184416!RIV12-MSM-21230___
http://linked.open...avai/predkladatel	Fakulta elektrotechnická
http://linked.open...avai/riv/aktivita	I
http://linked.open...avai/riv/aktivity	I
http://linked.open...iv/cisloPeriodika	20
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Kubart, Tomáš
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta elektrotechnická
http://linked.open...dnocenehoVysledku	196392
http://linked.open...ai/riv/idVysledku	RIV/68407700:21230/11:00184416
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	HiPIMS; Titanium dioxide; Rutile; Anatase; Reactive sputtering; TiO2 (en)
http://linked.open.../riv/klicoveSlovo	TiO2 Titanium dioxide HiPIMS Anatase Reactive sputtering Rutile
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[0D43FA1C3842]
http://linked.open...i/riv/nazevZdroje	Surface & Coatings Technology
http://linked.open...in/vavai/riv/obor	JI
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	205
http://linked.open...iv/tvurceVysledku	Aiempanakit, M. Aijaz, A. Helmersson, U. Jensen, J. Kubart, Tomáš Larsson, P. Magnusson, R.
http://linked.open...ain/vavai/riv/wos	000292361400013
issn	0257-8972
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2011.04.071
http://localhost/t...ganizacniJednotka	21230
is http://linked.open...avai/riv/vysledek of	Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide

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