About: Low-Temperature Formation of Deep Donor Layers by Proton Implantation: Effect of Hydrogen Plasma on Radiation Defect Removal

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About: Low-Temperature Formation of Deep Donor Layers by Proton Implantation: Effect of Hydrogen Plasma on Radiation Defect Removal Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Hydrogen plasma efficiently removes majority of vacancy-related defects generated by proton implantation in both FZ and CZ substrates. Plasma and post-implantation annealing lead to appearing of new defects in Si band gap. These defects deteriorate electrical properties of thermal hydrogen-related shallow donors. Hydrogen plasma efficiently removes majority of vacancy-related defects generated by proton implantation in both FZ and CZ substrates. Plasma and post-implantation annealing lead to appearing of new defects in Si band gap. These defects deteriorate electrical properties of thermal hydrogen-related shallow donors. (en)
Title	Low-Temperature Formation of Deep Donor Layers by Proton Implantation: Effect of Hydrogen Plasma on Radiation Defect Removal Low-Temperature Formation of Deep Donor Layers by Proton Implantation: Effect of Hydrogen Plasma on Radiation Defect Removal (en)
skos:prefLabel	Low-Temperature Formation of Deep Donor Layers by Proton Implantation: Effect of Hydrogen Plasma on Radiation Defect Removal Low-Temperature Formation of Deep Donor Layers by Proton Implantation: Effect of Hydrogen Plasma on Radiation Defect Removal (en)
skos:notation	RIV/68407700:21230/10:00169970!RIV11-GA0-21230___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP102/08/P488), P(LC06041), Z(MSM6840770014)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Hazdra, Pavel Komarnitskyy, Volodymyr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta elektrotechnická
http://linked.open...dnocenehoVysledku	268994
http://linked.open...ai/riv/idVysledku	RIV/68407700:21230/10:00169970
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Silicon; thermal donors; hydrogen plasma; implantation; protons (en)
http://linked.open.../riv/klicoveSlovo	Silicon protons implantation hydrogen plasma thermal donors
http://linked.open...ontrolniKodProRIV	[1A4EBFD7AE63]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	ISPS'10 PROCEEDINGS
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by energetic radiation. Synthesis of novel defects in silicon by ion irradiation for future application in semiconductor technology.
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Buršíková, V. Hazdra, Pavel Komarnitskyy, Volodymyr
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2010-09-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Výzkum perspektivních informačních a komunikačních technologií
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	České vysoké učení technické v Praze
https://schema.org/isbn	978-80-01-04602-9
http://localhost/t...ganizacniJednotka	21230
is http://linked.open...avai/riv/vysledek of	Low-Temperature Formation of Deep Donor Layers by Proton Implantation: Effect of Hydrogen Plasma on Radiation Defect Removal

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