About: ERD analysis and modification of TiO2 thin films with heavy ions

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Titanium dioxide (TiO2) films have been deposited on Si substrates using reactive magnetron sputtering. The resulting films, having a polycrystalline anatase phase with a dense columnar structure, were analysed by time-of-flight elastic recoil detection analysis (ToF-ERDA) using 40 MeV I9+ ions. A clear decrease in the areal atomic density (atoms/cm2) of Ti and O was observed during measurement, but the stoichiometry remained essentially constant up to a fluence of 4 × 1013 ions/cm2. To investigate this effect in more detail, X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) were applied in order to characterize the films prior to and after ion irradiation with fluences in the range of 1010-1013 ions/cm2. Distinct morphological and structural changes of the polycrystalline film were observed. XRD revealed that the crystallinity of the film was gradually destroyed, and the film became amorphous at a fluence above 5 × 1012 ions/cm2. Titanium dioxide (TiO2) films have been deposited on Si substrates using reactive magnetron sputtering. The resulting films, having a polycrystalline anatase phase with a dense columnar structure, were analysed by time-of-flight elastic recoil detection analysis (ToF-ERDA) using 40 MeV I9+ ions. A clear decrease in the areal atomic density (atoms/cm2) of Ti and O was observed during measurement, but the stoichiometry remained essentially constant up to a fluence of 4 × 1013 ions/cm2. To investigate this effect in more detail, X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) were applied in order to characterize the films prior to and after ion irradiation with fluences in the range of 1010-1013 ions/cm2. Distinct morphological and structural changes of the polycrystalline film were observed. XRD revealed that the crystallinity of the film was gradually destroyed, and the film became amorphous at a fluence above 5 × 1012 ions/cm2. (en)
Title	ERD analysis and modification of TiO2 thin films with heavy ions ERD analysis and modification of TiO2 thin films with heavy ions (en)
skos:prefLabel	ERD analysis and modification of TiO2 thin films with heavy ions ERD analysis and modification of TiO2 thin films with heavy ions (en)
skos:notation	RIV/68407700:21230/10:00168117!RIV11-GA0-21230___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GAP108/10/0218)
http://linked.open...iv/cisloPeriodika	11-12
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Kubart, Tomáš
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta elektrotechnická
http://linked.open...dnocenehoVysledku	257452
http://linked.open...ai/riv/idVysledku	RIV/68407700:21230/10:00168117
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Titanium dioxide; Thin films; Ion beam analysis; Elastic recoil detection; Ion beam modification (en)
http://linked.open.../riv/klicoveSlovo	Thin films Titanium dioxide Elastic recoil detection Ion beam analysis Ion beam modification
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[DA1A17202AE5]
http://linked.open...i/riv/nazevZdroje	Nuclear Instruments and Methods in Physics Research, Section B, Beam Interactions with Materials and Atoms
http://linked.open...in/vavai/riv/obor	JK
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced self-adaptive low friction coatings based on transition metal dichalcogenides alloyed with carbon
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	268
http://linked.open...iv/tvurceVysledku	Jensen, J. Kubart, Tomáš Martin, D. Surpi, A.
http://linked.open...ain/vavai/riv/wos	000278702300044
issn	0168-583X
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	21230
is http://linked.open...avai/riv/vysledek of	ERD analysis and modification of TiO2 thin films with heavy ions ERD analysis and modification of TiO2 thin films with heavy ions ERD analysis and modification of TiO2 thin films with heavy ions

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