This paper presents the design and fabrication of sensitive capacitive MEMS-based accelerometer and its high signal-to-noise ratio read-out electronic circuit. The combination of sensitive accelerometer and sensitive read-out electronics resulted in the system sensitivity of 135 V/G.
This paper presents the design and fabrication of sensitive capacitive MEMS-based accelerometer and its high signal-to-noise ratio read-out electronic circuit. The combination of sensitive accelerometer and sensitive read-out electronics resulted in the system sensitivity of 135 V/G. (en)