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Description
  • The local anodic oxidation (LAO) by the atomic force microscope (AFM) in the AC mode could be a good alternative to standard lithographic techniques especially for the device patterning in the nanometer scale at laboratory conditions. In the combination with EBL the nanostructures with the resolution of a few tenths of nanometers could be prepared in a very fast and efficient way.
  • The local anodic oxidation (LAO) by the atomic force microscope (AFM) in the AC mode could be a good alternative to standard lithographic techniques especially for the device patterning in the nanometer scale at laboratory conditions. In the combination with EBL the nanostructures with the resolution of a few tenths of nanometers could be prepared in a very fast and efficient way. (en)
Title
  • Nanoelectronics and nanolithography
  • Nanoelectronics and nanolithography (en)
skos:prefLabel
  • Nanoelectronics and nanolithography
  • Nanoelectronics and nanolithography (en)
skos:notation
  • RIV/68407700:21230/09:00158523!RIV11-MSM-21230___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(KAN400100652), Z(MSM6840770014)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 328408
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21230/09:00158523
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • nanolithography; local anodic oxidation; atomic force microscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [BF6D869D887B]
http://linked.open...v/mistoKonaniAkce
  • Rožnov pod Radhoštěm
http://linked.open...i/riv/mistoVydani
  • Ostrava
http://linked.open...i/riv/nazevZdroje
  • Nanocon 2009 Conference Proceedings
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Voves, Jan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • TANGER, spol.s r.o
https://schema.org/isbn
  • 978-80-87294-13-0
http://localhost/t...ganizacniJednotka
  • 21230
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