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Description
  • Článek popisuje použití indukční cívky jako senzoru pro měření tenkých vrstev. Tloušťka vrstvy je vyhodnocováno bezkontaktní metodou podle změny komplexní impedance cívky. (cs)
  • The paper described the using of an induction - coil as a thickness sensor of thin conductive layer. Thin film thickness is evaluated by non-contact method using the change of complex coil impedance.
  • The paper described the using of an induction - coil as a thickness sensor of thin conductive layer. Thin film thickness is evaluated by non-contact method using the change of complex coil impedance. (en)
Title
  • Contactless Measurement of Thin Film Thickness
  • Bezkontaktní měření tloušťky tenkých vrstev (cs)
  • Contactless Measurement of Thin Film Thickness (en)
skos:prefLabel
  • Contactless Measurement of Thin Film Thickness
  • Bezkontaktní měření tloušťky tenkých vrstev (cs)
  • Contactless Measurement of Thin Film Thickness (en)
skos:notation
  • RIV/68407700:21230/08:03148318!RIV09-MSM-21230___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM6840770015)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 361125
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21230/08:03148318
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Thin Film Measurement (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [12A3991EC60D]
http://linked.open...v/mistoKonaniAkce
  • Dresden
http://linked.open...i/riv/mistoVydani
  • Dresden
http://linked.open...i/riv/nazevZdroje
  • EUROSENSORS XXII 2008
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Papež, Václav
  • Papežová, Stanislava
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Eurosensors
https://schema.org/isbn
  • 978-3-00-025217-4
http://localhost/t...ganizacniJednotka
  • 21230
is http://linked.open...avai/riv/vysledek of
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