simulation fabrication and characterization of new GaN and GaAs Micromechanical Hotplate Gas Sensor (MHGSs). GaAs and GaN MHGSs seem to be very attractive for design of thermally based MEMS sensor devices
simulation fabrication and characterization of new GaN and GaAs Micromechanical Hotplate Gas Sensor (MHGSs). GaAs and GaN MHGSs seem to be very attractive for design of thermally based MEMS sensor devices (en)
GaN a GaAs mikromechanický tepelný převodník pro senzory plynů (cs)