About: Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing

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About: Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper deals with the study of radiation defects and thermal donors introduced in silicon by hydrogen and helium implantation and subsequent annealing. Introduction and thermal stability of introduced deep and shallow levels was investigated by means of DLTS and CV measurement. The paper deals with the study of radiation defects and thermal donors introduced in silicon by hydrogen and helium implantation and subsequent annealing. Introduction and thermal stability of introduced deep and shallow levels was investigated by means of DLTS and CV measurement. (en)
Title	Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing (en)
skos:prefLabel	Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing (en)
skos:notation	RIV/68407700:21230/08:00164298!RIV10-MSM-21230___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(LC06041), Z(MSM6840770014)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Hazdra, Pavel Komarnitskyy, Volodymyr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta elektrotechnická
http://linked.open...dnocenehoVysledku	391344
http://linked.open...ai/riv/idVysledku	RIV/68407700:21230/08:00164298
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ion implantation; silicon; deep levels; shallow levels; hydrogen; helium; dlts (en)
http://linked.open.../riv/klicoveSlovo	helium hydrogen silicon deep levels ion implantation dlts shallow levels
http://linked.open...ontrolniKodProRIV	[FF4D35C9F28C]
http://linked.open...v/mistoKonaniAkce	Erice
http://linked.open...i/riv/mistoVydani	Zürich
http://linked.open...i/riv/nazevZdroje	Gettering and Defect Engineering in Semiconductor Technology XII - Proceedings of the 12th International Autumn Meeting EMFCSC
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by energetic radiation.
http://linked.open...UplatneniVysledku	2008
http://linked.open...iv/tvurceVysledku	Hazdra, Pavel Komarnitskyy, Volodymyr
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open...ain/vavai/riv/wos	000252201200033
http://linked.open.../riv/zahajeniAkce	2007-10-14 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Výzkum perspektivních informačních a komunikačních technologií
issn	1012-0394
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Transtech Publications
https://schema.org/isbn	978-3-908451-43-3
http://localhost/t...ganizacniJednotka	21230
is http://linked.open...avai/riv/vysledek of	Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing

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