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  • This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. High thermal isolation of these devices can be done by implementing of free micromechanical hot plates which is designed as thin as possible.
  • This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. High thermal isolation of these devices can be done by implementing of free micromechanical hot plates which is designed as thin as possible. (en)
  • This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. High thermal isolation of these devices can be done by implementing of free micromechanical hot plates which is designed as thin as possible. (cs)
Title
  • Micromechanical GaAs Thermal Convertor for Gas Sensors
  • Micromechanical GaAs Thermal Convertor for Gas Sensors (en)
  • Micromechanical GaAs Thermal Convertor for Gas Sensors (cs)
skos:prefLabel
  • Micromechanical GaAs Thermal Convertor for Gas Sensors
  • Micromechanical GaAs Thermal Convertor for Gas Sensors (en)
  • Micromechanical GaAs Thermal Convertor for Gas Sensors (cs)
skos:notation
  • RIV/68407700:21230/07:03137145!RIV08-GA0-21230___
http://linked.open.../vavai/riv/strany
  • 244;247
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/06/1624)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 433716
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21230/07:03137145
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • MEMS, Gas Sensor (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [C5DBAB49B92D]
http://linked.open...v/mistoKonaniAkce
  • Santa Clara, CA
http://linked.open...i/riv/mistoVydani
  • Boston
http://linked.open...i/riv/nazevZdroje
  • Technical Proceedings of the Nanotech 2007
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Husák, Miroslav
  • Jakovenko, Jiří
  • Drzik, M. D.
  • Lalinsky, T. L.
  • Vanko, G. V.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Nano Science and Technology Institute
https://schema.org/isbn
  • 1-4200-6349-9
http://localhost/t...ganizacniJednotka
  • 21230
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