Cílem práce je navrhnout a odsimulovat jednoduchou polymerní strukturu senzoru vlhkosti v programu CoventorWare. Tato práce také poiná1í poehled MEMS struktur v oblasti vlhkostních senzoru. (cs)
The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezo-rezistive simulation in CoventorWare. Also this paper report about various type of the structure in the area of mems based humidity sensors.
The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezo-rezistive simulation in CoventorWare. Also this paper report about various type of the structure in the area of mems based humidity sensors. (en)