About: Single-chip Mechatronic Microsystem for Surface Imaging and Force Response Studies

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Single-chip Mechatronic Microsystem for Surface Imaging and Force Response Studies Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We report on a stand-alone single-chip (7 x 10 mm) atomic force microscopy unit including a fully integrated array of cantilevers, each of which has an individual actuation, detection, and control unit so that standard atomic force microscopy operations can be performed by means of the chip only without any external controller. The system offers drastically reduced overall size and costs as well as increased scanning speed and can be fabricated with standard complementary metal oxide semiconductor technology with some subsequent micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for the controlling and monitoring of all system functions. The on-chip circuitry, which includes analog signal amplification and filtering stages with offset compensation, analog-to-digital converters, a powerful digital signal processor, and an on-chip digital interface, notably improves the overall system performance. We report on a stand-alone single-chip (7 x 10 mm) atomic force microscopy unit including a fully integrated array of cantilevers, each of which has an individual actuation, detection, and control unit so that standard atomic force microscopy operations can be performed by means of the chip only without any external controller. The system offers drastically reduced overall size and costs as well as increased scanning speed and can be fabricated with standard complementary metal oxide semiconductor technology with some subsequent micromachining steps to form the cantilevers. Full integration of microelectronic and micromechanical components on the same chip allows for the controlling and monitoring of all system functions. The on-chip circuitry, which includes analog signal amplification and filtering stages with offset compensation, analog-to-digital converters, a powerful digital signal processor, and an on-chip digital interface, notably improves the overall system performance. (en)
Title	Single-chip Mechatronic Microsystem for Surface Imaging and Force Response Studies Single-chip Mechatronic Microsystem for Surface Imaging and Force Response Studies (en)
skos:prefLabel	Single-chip Mechatronic Microsystem for Surface Imaging and Force Response Studies Single-chip Mechatronic Microsystem for Surface Imaging and Force Response Studies (en)
skos:notation	RIV/68407700:21230/04:00118226!RIV10-MSM-21230___
http://linked.open...avai/riv/aktivita	S
http://linked.open...avai/riv/aktivity	S
http://linked.open...iv/cisloPeriodika	49
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Šedivý, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta elektrotechnická
http://linked.open...dnocenehoVysledku	586373
http://linked.open...ai/riv/idVysledku	RIV/68407700:21230/04:00118226
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Atomic Force Microscopy; AFM; CMOS; PID (en)
http://linked.open.../riv/klicoveSlovo	CMOS Atomic Force Microscopy PID AFM
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[A8009FDB3DD1]
http://linked.open...i/riv/nazevZdroje	Proceedings of the National Academy of Science of the United States of America
http://linked.open...in/vavai/riv/obor	JB
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...UplatneniVysledku	2004
http://linked.open...v/svazekPeriodika	101
http://linked.open...iv/tvurceVysledku	Šedivý, Jan
issn	1091-6490
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	21230

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software