Amorphous hydrogenated silicon carbide (a-SiC:H) coating was prepared by Plasma Enhanced Chemical Vapor Deposition technique. Mechanical properties of prepared film were assessed by cyclic nanoindentation test.
Amorphous hydrogenated silicon carbide (a-SiC:H) coating was prepared by Plasma Enhanced Chemical Vapor Deposition technique. Mechanical properties of prepared film were assessed by cyclic nanoindentation test. (en)