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  • In nanometrology, the common tools of metrological software are not sufficient to obtain the correct shape characteristic of measured details because the shape deviations can be comparable with the dimensions of measured detail. Therefore, the new methods for measured data processing are developed to obtain more detailed description of the measured shape. In this contribution, the method based on B-spline representation of measured data is described. This method has been developed and applied in the cooperation with Czech Metrology Institute.
  • In nanometrology, the common tools of metrological software are not sufficient to obtain the correct shape characteristic of measured details because the shape deviations can be comparable with the dimensions of measured detail. Therefore, the new methods for measured data processing are developed to obtain more detailed description of the measured shape. In this contribution, the method based on B-spline representation of measured data is described. This method has been developed and applied in the cooperation with Czech Metrology Institute. (en)
Title
  • Application of B-spline representation in nanometrology
  • Application of B-spline representation in nanometrology (en)
skos:prefLabel
  • Application of B-spline representation in nanometrology
  • Application of B-spline representation in nanometrology (en)
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  • RIV/68407700:21220/10:00192412!RIV13-MSM-21220___
http://linked.open...avai/riv/aktivita
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  • I
http://linked.open...iv/cisloPeriodika
  • 1
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  • 247400
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  • RIV/68407700:21220/10:00192412
http://linked.open...riv/jazykVysledku
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  • B-spline curve; discrete least squares method; shape deviation; measured data processing. (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [EBE19316ABCD]
http://linked.open...i/riv/nazevZdroje
  • South Bohemia Mathematical Letters
http://linked.open...in/vavai/riv/obor
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http://linked.open...UplatneniVysledku
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  • 18
http://linked.open...iv/tvurceVysledku
  • Linkeová, Ivana
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  • 1804-1450
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  • 21220
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